XPS investigation of the equilibrium segregation of antimony at germanium surface

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Abstract

X-ray Photoelectron Spectroscopy (XPS) has been used to investigate the antimony segregation at Ge surface. Heat treatments of various durations have been carried out under vacuum at T = 600 °C. Etching Ge surface with Argon ions prior to the heat treatment enhances drastically the segregation process. A high value of the antimony diffusion coefficient (D = 7×10-10 cm2/s) was obtained from the experimental data. A shift of the Ge core levels towards the high binding energies was observed as the dopant surface density increases. The shift was related to the band bending that results from a high density of surface states.

Original languageEnglish
Pages (from-to)415-420
Number of pages6
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume114-116
DOIs
Publication statusPublished - 1 Mar 2001
Externally publishedYes

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ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Spectroscopy
  • Atomic and Molecular Physics, and Optics
  • Surfaces and Interfaces

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