Towards optimization of time modulated chemical vapour deposition for nanostructured diamond films on Ti6Al4V

Z. Nibennaoune, D. George, F. Antoni, J. Santos, G. Cabral, Said Ahzi, D. Ruch, J. Gracio, Y. Remond

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

In this paper, we report the use of the TMCVD technique for the optimisation of deposited diamond films onto Ti6Al4V substrates. A number of samples were made varying the experimental parameters. The specimen surfaces were characterised using micro Raman spectra and SEM analyses. Results show that very different surface finish (from micro to nanostructures) and film characteristics can be obtained from the experimental parameters used. The quality of deposited diamond is very dependant on the experimental settings and process. It was found that lower residual stresses are developed using the TMCVD technique than with conventional CVD but depend on the structural diamond growth during the process. The quality of the deposited film was evaluated as a function of diamond to amorphous carbon ratio but showed no direct relation with the surface finish since it characterises the quality of the deposited diamond but not the quality of the film surface.

Original languageEnglish
Pages (from-to)2838-2843
Number of pages6
JournalJournal of Nanoscience and Nanotechnology
Volume10
Issue number4
DOIs
Publication statusPublished - Apr 2010
Externally publishedYes

Fingerprint

Diamond
Diamond films
diamond films
Chemical vapor deposition
Diamonds
diamonds
vapor deposition
optimization
Amorphous carbon
Raman Spectrum Analysis
Nanostructures
residual stress
Raman scattering
Residual stresses
Raman spectra
Carbon
Scanning electron microscopy
scanning electron microscopy
titanium alloy (TiAl6V4)
carbon

Keywords

  • Diamond film
  • Optimisation
  • Raman spectroscopy
  • Residual stresses
  • Surface finish
  • Ti6Al4V
  • TMCVD

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Chemistry(all)
  • Materials Science(all)
  • Bioengineering
  • Biomedical Engineering

Cite this

Towards optimization of time modulated chemical vapour deposition for nanostructured diamond films on Ti6Al4V. / Nibennaoune, Z.; George, D.; Antoni, F.; Santos, J.; Cabral, G.; Ahzi, Said; Ruch, D.; Gracio, J.; Remond, Y.

In: Journal of Nanoscience and Nanotechnology, Vol. 10, No. 4, 04.2010, p. 2838-2843.

Research output: Contribution to journalArticle

Nibennaoune, Z, George, D, Antoni, F, Santos, J, Cabral, G, Ahzi, S, Ruch, D, Gracio, J & Remond, Y 2010, 'Towards optimization of time modulated chemical vapour deposition for nanostructured diamond films on Ti6Al4V', Journal of Nanoscience and Nanotechnology, vol. 10, no. 4, pp. 2838-2843. https://doi.org/10.1166/jnn.2010.1456
Nibennaoune, Z. ; George, D. ; Antoni, F. ; Santos, J. ; Cabral, G. ; Ahzi, Said ; Ruch, D. ; Gracio, J. ; Remond, Y. / Towards optimization of time modulated chemical vapour deposition for nanostructured diamond films on Ti6Al4V. In: Journal of Nanoscience and Nanotechnology. 2010 ; Vol. 10, No. 4. pp. 2838-2843.
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