Thin photo-patterned micropolarizer array for CMOS image sensors

Xiaojin Zhao, Farid Boussaid, Amine Bermak, Vladimir G. Chigrinov

Research output: Contribution to journalArticle

62 Citations (Scopus)

Abstract

We fabricated and characterized a thin photo-patterned micropolarizer array for complementary metal-oxide-semiconductor (CMOS) image sensors. The proposed micropolarizer fabrication technology completely removes the need for complex selective etching. Instead, it uses the well-controlled process of ultraviolet photolithography to define micropolarizer orientation patterns on a spin-coated azo-dye-1 film. The patterned polymer film micropolarizer (10 μm × 10 μm) exhibits submicron thickness (0.3 μm) and has an extinction ratio of ∼100. Reported experimental results validate the concept of a thin, high spatial resolution, low-cost photo-patterned micropolarizer array for CMOS image sensors.

Original languageEnglish
Pages (from-to)805-807
Number of pages3
JournalIEEE Photonics Technology Letters
Volume21
Issue number12
DOIs
Publication statusPublished - 15 Jun 2009
Externally publishedYes

Fingerprint

Image sensors
CMOS
Azo Compounds
Metals
Azo dyes
sensors
Photolithography
photolithography
Polymer films
Etching
extinction
spatial resolution
dyes
etching
Fabrication
fabrication
high resolution
polymers
Costs
Oxide semiconductors

Keywords

  • Arrays
  • CMOS image sensors
  • CMOS integrated circuits
  • Complementary metal-oxide-semiconductor (CMOS) image sensor
  • Fabrication
  • Glass
  • Micropolarizer array
  • Polarization imaging
  • Sensors
  • Substrates

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Thin photo-patterned micropolarizer array for CMOS image sensors. / Zhao, Xiaojin; Boussaid, Farid; Bermak, Amine; Chigrinov, Vladimir G.

In: IEEE Photonics Technology Letters, Vol. 21, No. 12, 15.06.2009, p. 805-807.

Research output: Contribution to journalArticle

Zhao, Xiaojin ; Boussaid, Farid ; Bermak, Amine ; Chigrinov, Vladimir G. / Thin photo-patterned micropolarizer array for CMOS image sensors. In: IEEE Photonics Technology Letters. 2009 ; Vol. 21, No. 12. pp. 805-807.
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