Thermal-fluid MEMS devices: A decade of progress and challenges ahead

Research output: Contribution to journalReview article

17 Citations (Scopus)

Abstract

Microdevices are becoming more prevalent and important in current and future technologies. Over the past decade, countless studies have been conducted in developing thermal microdevices. This paper focuses on the progress of research made during the last decade regarding heat transfer and fluid flow in microheat sinks, micropumps, microturbines, microengines, micromixers, as well as microsensors. Recent experimental techniques in the thermal microelectromechanical systems (MEMS) field have also been presented. Although some thermal MEMS devices have penetrated the commercial market, the mass implementation of thermal MEMS devices in future technology is still quite far, and is highly desirable. During the next decade, vast amounts of research need to be conducted before other microdevices can infiltrate the main-stream. Possible future directions of research have also been provided.

Original languageEnglish
Pages (from-to)1221-1233
Number of pages13
JournalJournal of Heat Transfer
Volume128
Issue number11
DOIs
Publication statusPublished - Nov 2006
Externally publishedYes

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Keywords

  • Experimental techniques
  • Microchannels
  • Microengines
  • Microheat sinks
  • Micromixers
  • Micropumps
  • Microsensors
  • Microturbines
  • Thermal MEMS

ASJC Scopus subject areas

  • Mechanical Engineering
  • Physical and Theoretical Chemistry
  • Fluid Flow and Transfer Processes

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