We describe the results of irradiating sodium trisilicate glass with 248-nm excimer laser light at fluences from 1 to 5 J/cm2. A threshold for the onset of etching occurs at 3 J/cm2. We investigate the changes in surface topography as a function of laser fluence. We also identify the ionic and neutral species contained in the emission plume. A clear correlation is observed between the etching threshold and (i) onset of emission of fast excited neutrals, as well as (ii) the appearance of atomic Na D resonance radiation. The high velocities (10–15 km/s) of the excited neutrals and ions (H +, Na+, and Si+) are attributed to laser/plume interactions. The character and origin of lower velocity neutral species (atomic O, Si and molecular NaO) are presented. The possible role of surface fracture in the onset of etching is also discussed.
|Number of pages||9|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 1989|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films