Synthesis and characterization of anatase-TiO2 thin films

B. R. Sankapal, M. Ch Lux-Steiner, A. Ennaoui

Research output: Contribution to journalArticle

94 Citations (Scopus)

Abstract

A new and effective method for the preparation of nanocrystalline TiO 2 (anatase) thin films is presented. This method is based on the use of peroxo-titanium complex as a single precursor. Post-annealing treatment is necessary to convert the deposited amorphous film into TiO2 (anatase) phase. The films obtained are uniform, compact and free of pinholes. A wide range of techniques are used for characterization, namely X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), transmission electron microscopy (TEM), energy-dispersive X-ray analysis (EDAX) and UV-Vis-NIR spectrophotometer. Glass, indium-doped tin oxide (ITO) and quartz are used as substrates. TiO2 (anatase) phase with (1 0 1) preferred orientation is obtained for the films. Byproduct (collected powder) consists of the same crystal structure. The optical measurement reveals the indirect bandgap of 3.2 eV.

Original languageEnglish
Pages (from-to)165-170
Number of pages6
JournalApplied Surface Science
Volume239
Issue number2
DOIs
Publication statusPublished - 15 Jan 2005
Externally publishedYes

Fingerprint

anatase
Titanium dioxide
Thin films
synthesis
thin films
Indium
Quartz
Energy dispersive X ray analysis
Spectrophotometers
Amorphous films
pinholes
spectrophotometers
Titanium
Tin oxides
optical measurement
Powders
tin oxides
Byproducts
indium
Energy dispersive spectroscopy

Keywords

  • Characterization
  • Synthesis
  • Thin films
  • Titanium dioxide

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Synthesis and characterization of anatase-TiO2 thin films. / Sankapal, B. R.; Lux-Steiner, M. Ch; Ennaoui, A.

In: Applied Surface Science, Vol. 239, No. 2, 15.01.2005, p. 165-170.

Research output: Contribution to journalArticle

Sankapal, B. R. ; Lux-Steiner, M. Ch ; Ennaoui, A. / Synthesis and characterization of anatase-TiO2 thin films. In: Applied Surface Science. 2005 ; Vol. 239, No. 2. pp. 165-170.
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