Surface micromachined viscous spiral pump

M. I. Kilani, P. C. Galambos, Y. Haik, C. J. Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

One distinguishing feature of micro scale fluid flow is its low Reynolds number, which is attributed to the small characteristic dimension and dominant viscous effects. Motivated by the observation that low Reynolds pumping on the macro-scale is often achieved by viscous drag, a micro-scale viscous drag pump, which drags fluid along a spiral-shaped channel, is developed using surface micromachining. The paper presents the detailed design of the mechanical elements of the pump and an analysis of the flow field in its spiral channel.

Original languageEnglish
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages210-213
Number of pages4
Publication statusPublished - 1 Dec 2003
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: 23 Feb 200327 Feb 2003

Publication series

Name2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Volume1

Conference

Conference2003 Nanotechnology Conference and Trade Show - Nanotech 2003
CountryUnited States
CitySan Francisco, CA
Period23/2/0327/2/03

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Keywords

  • Micropump
  • Spiral
  • Surface micromachining
  • Viscous

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kilani, M. I., Galambos, P. C., Haik, Y., & Chen, C. J. (2003). Surface micromachined viscous spiral pump. In M. Laudon, & B. Romanowicz (Eds.), 2003 Nanotechnology Conference and Trade Show - Nanotech 2003 (pp. 210-213). (2003 Nanotechnology Conference and Trade Show - Nanotech 2003; Vol. 1).