Surface micromachined crescent micropump

Yousef Haik, Jason Hendrix, Paul Galambos, Mohammad Kilani

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study presents the design, fabrication, analysis and testing of a novel crescent micropump fabricated using surface micromachining technology. The pump utilizes a ring gear driven through teeth on its outer surface to drive the pumping mechanism through teeth on its inner surface. An analytical solution for the volumetric flow rate for the micropump agrees with the obtained experimental results.

Original languageEnglish
Title of host publicationISMA'10 - 7th International Symposium on Mechatronics and its Applications
Publication statusPublished - 2010
Externally publishedYes
Event7th International Symposium on Mechatronics and its Applications, ISMA'10 - Sharjah, United Arab Emirates
Duration: 20 Apr 201022 Apr 2010

Other

Other7th International Symposium on Mechatronics and its Applications, ISMA'10
CountryUnited Arab Emirates
CitySharjah
Period20/4/1022/4/10

Fingerprint

Surface micromachining
Gear teeth
Gears
Flow rate
Pumps
Fabrication
Testing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering

Cite this

Haik, Y., Hendrix, J., Galambos, P., & Kilani, M. (2010). Surface micromachined crescent micropump. In ISMA'10 - 7th International Symposium on Mechatronics and its Applications [5478431]

Surface micromachined crescent micropump. / Haik, Yousef; Hendrix, Jason; Galambos, Paul; Kilani, Mohammad.

ISMA'10 - 7th International Symposium on Mechatronics and its Applications. 2010. 5478431.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Haik, Y, Hendrix, J, Galambos, P & Kilani, M 2010, Surface micromachined crescent micropump. in ISMA'10 - 7th International Symposium on Mechatronics and its Applications., 5478431, 7th International Symposium on Mechatronics and its Applications, ISMA'10, Sharjah, United Arab Emirates, 20/4/10.
Haik Y, Hendrix J, Galambos P, Kilani M. Surface micromachined crescent micropump. In ISMA'10 - 7th International Symposium on Mechatronics and its Applications. 2010. 5478431
Haik, Yousef ; Hendrix, Jason ; Galambos, Paul ; Kilani, Mohammad. / Surface micromachined crescent micropump. ISMA'10 - 7th International Symposium on Mechatronics and its Applications. 2010.
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