Surface cleaning and passivation of chalcogenide thin films using s(NH4)2 chemical treatment

Marie Buffiere, Abdel Aziz El Mel, Nick Lenaers, Guy Brammertz, Armin E. Zaghi, Marc Meuris, Jef Poortmans

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationUltra Clean Processing of Semiconductor Surfaces XII
PublisherTrans Tech Publications Ltd
Pages320-323
Number of pages4
Volume219
ISBN (Electronic)9783038352426
DOIs
Publication statusPublished - 2015
Externally publishedYes
Event12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014 - Brussels, Belgium
Duration: 21 Sep 201424 Sep 2014

Publication series

NameSolid State Phenomena
Volume219
ISSN (Electronic)16629779

Other

Other12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2014
CountryBelgium
CityBrussels
Period21/9/1424/9/14

Keywords

  • Chemical treatment
  • CIGS
  • CZTS
  • Etching
  • Passivation
  • Secondary phases
  • Thin film solar cells

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

Buffiere, M., Mel, A. A. E., Lenaers, N., Brammertz, G., Zaghi, A. E., Meuris, M., & Poortmans, J. (2015). Surface cleaning and passivation of chalcogenide thin films using s(NH4)2 chemical treatment. In Ultra Clean Processing of Semiconductor Surfaces XII (Vol. 219, pp. 320-323). (Solid State Phenomena; Vol. 219). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/SSP.219.320