Structure of Ti1-xTaxN thin films prepared by DC-magnetron sputtering

O. Bourbia, N. Guerfi, S. Achour, Nouar Tabet, A. Mosser

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

X-ray photoelectron spectroscopy (XPS) and high resolution transmission electron microscopy (HRTEM) were used to investigate the effect of tantalum addition on the TiN thin films structure. Both the HRTEM and selected area electron diffraction have showed that the films possess a fine grained polycrystalline structure with an average grain size in the order of 10 nm. The chemical composition of the films was determined by the use of the Ti2p, N1s and Ta4f core level peaks. The analysis of Ta4f core level revealed the presence of Ta-N bond indicating that tantalum atoms can occupy the titanium sublattice sites. Moreover, the XPS spectra revealed the presence of Ta2O 5 in the films.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages387-392
Number of pages6
Volume480-481
Publication statusPublished - 1 Dec 2005
Externally publishedYes
Event1st International Meeting on Applied Physics, APHYS-2003 - Badajoz, Spain
Duration: 13 Oct 200318 Oct 2003

Publication series

NameMaterials Science Forum
Volume480-481
ISSN (Print)02555476

Other

Other1st International Meeting on Applied Physics, APHYS-2003
CountrySpain
CityBadajoz
Period13/10/0318/10/03

Fingerprint

Magnetron sputtering
Tantalum
Core levels
High resolution transmission electron microscopy
Thin films
X ray photoelectron spectroscopy
Titanium
Electron diffraction
Atoms
Chemical analysis

Keywords

  • DC magnetron sputtering
  • HRTEM
  • Structure
  • TiTaN
  • XPS

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Bourbia, O., Guerfi, N., Achour, S., Tabet, N., & Mosser, A. (2005). Structure of Ti1-xTaxN thin films prepared by DC-magnetron sputtering. In Materials Science Forum (Vol. 480-481, pp. 387-392). (Materials Science Forum; Vol. 480-481).

Structure of Ti1-xTaxN thin films prepared by DC-magnetron sputtering. / Bourbia, O.; Guerfi, N.; Achour, S.; Tabet, Nouar; Mosser, A.

Materials Science Forum. Vol. 480-481 2005. p. 387-392 (Materials Science Forum; Vol. 480-481).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bourbia, O, Guerfi, N, Achour, S, Tabet, N & Mosser, A 2005, Structure of Ti1-xTaxN thin films prepared by DC-magnetron sputtering. in Materials Science Forum. vol. 480-481, Materials Science Forum, vol. 480-481, pp. 387-392, 1st International Meeting on Applied Physics, APHYS-2003, Badajoz, Spain, 13/10/03.
Bourbia O, Guerfi N, Achour S, Tabet N, Mosser A. Structure of Ti1-xTaxN thin films prepared by DC-magnetron sputtering. In Materials Science Forum. Vol. 480-481. 2005. p. 387-392. (Materials Science Forum).
Bourbia, O. ; Guerfi, N. ; Achour, S. ; Tabet, Nouar ; Mosser, A. / Structure of Ti1-xTaxN thin films prepared by DC-magnetron sputtering. Materials Science Forum. Vol. 480-481 2005. pp. 387-392 (Materials Science Forum).
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