Structure, morphology, and optical properties of amorphous and nanocrystalline gallium oxide thin films

S. Sampath Kumar, E. J. Rubio, M. Noor-A-Alam, G. Martinez, S. Manandhar, V. Shutthanandan, S. Thevuthasan, C. V. Ramana

Research output: Contribution to journalArticle

82 Citations (Scopus)

Abstract

Gallium oxide (Ga2O3) thin films were produced by sputter deposition by varying the substrate temperature (Ts) in a wide range (Ts = 25-800 °C). The structural characteristics and optical properties of Ga2O3 films were evaluated using X-ray diffraction (XRD), scanning electron microscopy (SEM), energy-dispersive X-ray spectrometry (EDS), Rutherford backscattering spectrometry (RBS), and spectrophotometric measurements. The effect of growth temperature is significant on the chemistry, crystal structure, and morphology of Ga2O 3 films. XRD and SEM analyses indicate that the Ga2O 3 films grown at lower temperatures were amorphous, while those grown at Ts ≥ 500 °C were nanocrystalline. RBS measurements indicate the well-maintained stoichiometry of Ga2O3 films at Ts = 300-800 °C. The spectral transmission of the films increased with increasing temperature. The band gap of the films varied from 4.96 to 5.17 eV for a variation in Ts in the range 25-800 °C. A relationship between microstructure and optical property is discussed.

Original languageEnglish
Pages (from-to)4194-4200
Number of pages7
JournalJournal of Physical Chemistry C
Volume117
Issue number8
DOIs
Publication statusPublished - 2013
Externally publishedYes

Fingerprint

gallium oxides
Gallium
Oxide films
Optical properties
optical properties
Thin films
thin films
Rutherford backscattering spectroscopy
Spectrometry
backscattering
X ray diffraction
Sputter deposition
Scanning electron microscopy
scanning electron microscopy
crystal morphology
Growth temperature
diffraction
Stoichiometry
Temperature
x ray spectroscopy

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Energy(all)

Cite this

Kumar, S. S., Rubio, E. J., Noor-A-Alam, M., Martinez, G., Manandhar, S., Shutthanandan, V., ... Ramana, C. V. (2013). Structure, morphology, and optical properties of amorphous and nanocrystalline gallium oxide thin films. Journal of Physical Chemistry C, 117(8), 4194-4200. https://doi.org/10.1021/jp311300e

Structure, morphology, and optical properties of amorphous and nanocrystalline gallium oxide thin films. / Kumar, S. Sampath; Rubio, E. J.; Noor-A-Alam, M.; Martinez, G.; Manandhar, S.; Shutthanandan, V.; Thevuthasan, S.; Ramana, C. V.

In: Journal of Physical Chemistry C, Vol. 117, No. 8, 2013, p. 4194-4200.

Research output: Contribution to journalArticle

Kumar, SS, Rubio, EJ, Noor-A-Alam, M, Martinez, G, Manandhar, S, Shutthanandan, V, Thevuthasan, S & Ramana, CV 2013, 'Structure, morphology, and optical properties of amorphous and nanocrystalline gallium oxide thin films', Journal of Physical Chemistry C, vol. 117, no. 8, pp. 4194-4200. https://doi.org/10.1021/jp311300e
Kumar, S. Sampath ; Rubio, E. J. ; Noor-A-Alam, M. ; Martinez, G. ; Manandhar, S. ; Shutthanandan, V. ; Thevuthasan, S. ; Ramana, C. V. / Structure, morphology, and optical properties of amorphous and nanocrystalline gallium oxide thin films. In: Journal of Physical Chemistry C. 2013 ; Vol. 117, No. 8. pp. 4194-4200.
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