TiO2 coating films of 50-200nm thickness were prepared by the sol-gel technique using hydrolysis of titanium isopropoxide (TIP) in an attempt to study structure and surface properties of anatase at ambient temperature. The anatase phase is exhibited by the XRD peak at 20=25° with orientation in (101), the crystal parameters of XRD for TiO2 thin films (50-200 nm), were varied depending on the thickness of film and substrate type. An annealing temperature and annealing time had an effect on the film surface quality and exhibit porosity and aggregates in the films. The surface of TiO2 thin film showed cluster particles through SEM and the shrinkage rate on the film increased as a result of heat treatment during annealing process. The film was uniform and homogeneous under AFM investigate. EDS have determined the stochiometric ratio of TiO2 film.