Structure and surface properties of anatase TiO2 thin film by sol-gel technique

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

TiO2 coating films of 50-200nm thickness were prepared by the sol-gel technique using hydrolysis of titanium isopropoxide (TIP) in an attempt to study structure and surface properties of anatase at ambient temperature. The anatase phase is exhibited by the XRD peak at 20=25° with orientation in (101), the crystal parameters of XRD for TiO2 thin films (50-200 nm), were varied depending on the thickness of film and substrate type. An annealing temperature and annealing time had an effect on the film surface quality and exhibit porosity and aggregates in the films. The surface of TiO2 thin film showed cluster particles through SEM and the shrinkage rate on the film increased as a result of heat treatment during annealing process. The film was uniform and homogeneous under AFM investigate. EDS have determined the stochiometric ratio of TiO2 film.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages165-172
Number of pages8
Volume517
DOIs
Publication statusPublished - 2006
Externally publishedYes
EventInternational Conference on Functional Materials and Devices, ICFMD-2005 - Kuala Lumpur
Duration: 6 Jun 20058 Jun 2005

Publication series

NameMaterials Science Forum
Volume517
ISSN (Print)02555476

Other

OtherInternational Conference on Functional Materials and Devices, ICFMD-2005
CityKuala Lumpur
Period6/6/058/6/05

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Keywords

  • Coating films
  • Crystalline phases
  • Microstructure of TiO
  • Titania

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Al-Jufairi, N. (2006). Structure and surface properties of anatase TiO2 thin film by sol-gel technique. In Materials Science Forum (Vol. 517, pp. 165-172). (Materials Science Forum; Vol. 517). https://doi.org/10.4028/0-87849-404-9.165