Structural, optical and electrical properties of indium tin oxide thin films prepared by spray pyrolysis

E. Benamar, M. Rami, C. Messaoudi, D. Sayah, A. Ennaoui

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64 Citations (Scopus)


Spray pyrolysis process has been used to deposit highly transparent and conducting films of tin-doped indium oxide onto glass substrates. The electrical, structural and optical properties have been investigated as a function of various deposition parameters namely dopant concentrations, temperature and nature of substrate. The morphology of the surface as a function of the substrate temperature has been studied using atomic force microscopy. XRD has shown that deposited films are polycrystalline without second phases and have a preferred orientation (400). Indium tin oxide layers with low resistivity values around 4 × 10-5 Ω cm and transmission coefficients in the visible and near-infrared range of about 85-90% have been easily obtained.

Original languageEnglish
Pages (from-to)125-139
Number of pages15
JournalSolar Energy Materials and Solar Cells
Issue number2
Publication statusPublished - 1 Jan 1999



  • Indian tin oxide
  • Spray pyrolysis
  • Transparent coatings

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films

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