Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis

H. El Rhaleb, E. Benamar, M. Rami, J. P. Roger, A. Hakam, A. Ennaoui

Research output: Contribution to journalArticle

56 Citations (Scopus)

Abstract

Spectroscopic ellipsometry (SE) has proven to be a very powerful diagnostic for thin film characterisation. It was used to determine thin film parameters such as film thickness and optical functions of polycrystalline tin-doped indium oxide (ITO) films deposited by spray pyrolysis onto Pyrex substrates. Dielectric ITO films often present microstructures which give rise to a variation of the refractive index with the distance from substrate. In this work, it was found that the fit between ellipsometric data and optical models results could be significantly improved when it was assumed that the refractive index of ITO films varied across the upper 60 nm near the film surface. Also, the surface roughness was modelled and compared with that given by the atomic force microscope (AFM).

Original languageEnglish
Pages (from-to)138-145
Number of pages8
JournalApplied Surface Science
Volume201
Issue number1-4
DOIs
Publication statusPublished - 30 Nov 2002
Externally publishedYes

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Keywords

  • Graded structure
  • ITO
  • Optical properties
  • Spectroscopic ellipsometry
  • Spray pyrolysis

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

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