Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis

H. El Rhaleb, E. Benamar, M. Rami, J. P. Roger, A. Hakam, A. Ennaoui

Research output: Contribution to journalArticle

54 Citations (Scopus)

Abstract

Spectroscopic ellipsometry (SE) has proven to be a very powerful diagnostic for thin film characterisation. It was used to determine thin film parameters such as film thickness and optical functions of polycrystalline tin-doped indium oxide (ITO) films deposited by spray pyrolysis onto Pyrex substrates. Dielectric ITO films often present microstructures which give rise to a variation of the refractive index with the distance from substrate. In this work, it was found that the fit between ellipsometric data and optical models results could be significantly improved when it was assumed that the refractive index of ITO films varied across the upper 60 nm near the film surface. Also, the surface roughness was modelled and compared with that given by the atomic force microscope (AFM).

Original languageEnglish
Pages (from-to)138-145
Number of pages8
JournalApplied Surface Science
Volume201
Issue number1-4
DOIs
Publication statusPublished - 30 Nov 2002
Externally publishedYes

Fingerprint

Spray pyrolysis
Spectroscopic ellipsometry
Tin oxides
indium oxides
Indium
tin oxides
Oxide films
ellipsometry
pyrolysis
sprayers
oxide films
ITO (semiconductors)
profiles
Refractive index
refractivity
Thin films
Tin
borosilicate glass
Substrates
thin films

Keywords

  • Graded structure
  • ITO
  • Optical properties
  • Spectroscopic ellipsometry
  • Spray pyrolysis

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Condensed Matter Physics

Cite this

Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis. / El Rhaleb, H.; Benamar, E.; Rami, M.; Roger, J. P.; Hakam, A.; Ennaoui, A.

In: Applied Surface Science, Vol. 201, No. 1-4, 30.11.2002, p. 138-145.

Research output: Contribution to journalArticle

El Rhaleb, H. ; Benamar, E. ; Rami, M. ; Roger, J. P. ; Hakam, A. ; Ennaoui, A. / Spectroscopic ellipsometry studies of index profile of indium tin oxide films prepared by spray pyrolysis. In: Applied Surface Science. 2002 ; Vol. 201, No. 1-4. pp. 138-145.
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