Shape and quality of Si single bulk crystals grown inside Si melts using the noncontact crucible method

Kazuo Nakajima, Ryota Murai, Satoshi Ono, Kohei Morishita, Maulid Kivambe, Douglas M. Powell, Tonio Buonassisi

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

The noncontact crucible method enables production of Si bulk single crystals without crucible contact by intentionally establishing a distinct low-temperature region in the Si melt. In this contribution, we correlate crystal growth conditions to crystal material properties. The shape of the growing interface was generally convex in the growth direction. The quality of the Si ingots was determined by the spatial distributions of dislocations, resistivity, oxygen concentration, and minority-carrier lifetime. In an ingot with a convex bottom, swirl patterns with higher resistivity are present in the top, middle, and bottom of the ingot. The dislocation density decreased from the top (first to solidify) to the bottom of the ingot because dislocations in the ingot moved to the periphery from the center of the ingot during crystal growth owing to the convex growing interface. The oxygen concentration was concentrically distributed on the seed axis owing to the convex growing interface. The lifetime was as high as 1.8ms after phosphorus diffusion gettering (PDG) and 205 μs before PDG at an injection level of 1 × 1015cm-3. The lifetime was not strongly affected by the dislocation density, which was as low as 102-103cm-2.

Original languageEnglish
Pages (from-to)15504
Number of pages1
JournalJapanese Journal of Applied Physics
Volume54
Issue number1
DOIs
Publication statusPublished - 1 Jan 2015
Externally publishedYes

Fingerprint

Crucibles
ingots
crucibles
Ingots
Crystals
crystals
Crystal growth
phosphorus
Phosphorus
crystal growth
production engineering
life (durability)
electrical resistivity
Oxygen
Carrier lifetime
oxygen
carrier lifetime
minority carriers
Spatial distribution
Seed

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Shape and quality of Si single bulk crystals grown inside Si melts using the noncontact crucible method. / Nakajima, Kazuo; Murai, Ryota; Ono, Satoshi; Morishita, Kohei; Kivambe, Maulid; Powell, Douglas M.; Buonassisi, Tonio.

In: Japanese Journal of Applied Physics, Vol. 54, No. 1, 01.01.2015, p. 15504.

Research output: Contribution to journalArticle

Nakajima, Kazuo ; Murai, Ryota ; Ono, Satoshi ; Morishita, Kohei ; Kivambe, Maulid ; Powell, Douglas M. ; Buonassisi, Tonio. / Shape and quality of Si single bulk crystals grown inside Si melts using the noncontact crucible method. In: Japanese Journal of Applied Physics. 2015 ; Vol. 54, No. 1. pp. 15504.
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