Robust control of an electrostatic microelectromechanical actuator

Mansour Karkoub, M. Zribi

Research output: Contribution to journalArticle

Abstract

A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectromechanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well.

Original languageEnglish
Pages (from-to)12-20
Number of pages9
JournalOpen Mechanics Journal
Volume2
Issue number1
DOIs
Publication statusPublished - 2008
Externally publishedYes

Fingerprint

Robust control
MEMS
Electrostatics
Actuators
Controllers
Electromechanical actuators
Feedback linearization
Hard disk storage
Closed loop systems
Mirrors
Switches
Electric potential

Keywords

  • Electrostatic
  • Microelectromechanical actuator
  • Robust control

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Robust control of an electrostatic microelectromechanical actuator. / Karkoub, Mansour; Zribi, M.

In: Open Mechanics Journal, Vol. 2, No. 1, 2008, p. 12-20.

Research output: Contribution to journalArticle

@article{71bfa8120da04c40a248a0d861323ca7,
title = "Robust control of an electrostatic microelectromechanical actuator",
abstract = "A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectromechanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well.",
keywords = "Electrostatic, Microelectromechanical actuator, Robust control",
author = "Mansour Karkoub and M. Zribi",
year = "2008",
doi = "10.2174/1874158400802010012",
language = "English",
volume = "2",
pages = "12--20",
journal = "Open Mechanics Journal",
issn = "1874-1584",
publisher = "Bentham Science Publishers",
number = "1",

}

TY - JOUR

T1 - Robust control of an electrostatic microelectromechanical actuator

AU - Karkoub, Mansour

AU - Zribi, M.

PY - 2008

Y1 - 2008

N2 - A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectromechanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well.

AB - A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent position. This paper addresses the control of an electrostatic microelectromechanical actuator to reduce the vibration effect on its performance. A feedback linearization controller, a static sliding mode controller and a dynamic sliding mode controller are designed for the microelectromechanical system. The stability of the closed loop system is proved. Simulation results indicate that the proposed control schemes work well.

KW - Electrostatic

KW - Microelectromechanical actuator

KW - Robust control

UR - http://www.scopus.com/inward/record.url?scp=84860680029&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84860680029&partnerID=8YFLogxK

U2 - 10.2174/1874158400802010012

DO - 10.2174/1874158400802010012

M3 - Article

AN - SCOPUS:84860680029

VL - 2

SP - 12

EP - 20

JO - Open Mechanics Journal

JF - Open Mechanics Journal

SN - 1874-1584

IS - 1

ER -