Properties of NdFeB film grown on silicon substrate by PLD under external magnetic field

Pan Zheng, Yousef Haik, Ching Jen Chen, Zhaoning Jiang, Jim P. Zheng

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

Nd-Fe-B films were grown on silicon substrate subjected to perpendicular magnetic field using pulsed laser deposition. The effect of substrate temperature (250-650 °C) on the magnetic properties of the film was studied. Magnetic anisotropy was observed in amorphous deposited film. Minor Nd2Fe14B crystalline phase was found when films were deposited at 500 °C and 650 °C. No obvious magnetic crystalline anisotropy shown after the correction of shape anisotropy.

Original languageEnglish
Pages (from-to)372-377
Number of pages6
JournalSurface and Coatings Technology
Volume194
Issue number2-3
DOIs
Publication statusPublished - 1 May 2005
Externally publishedYes

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Keywords

  • Magnetic MEMS
  • Pulsed laser deposition
  • Thin film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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