Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model

Xiaoyi Wang, Wei Xu, Beiqi Lijin, Moaaz Ahmed, Amine Bermak, Yi Kuen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We proposed a general T-dimensional (1D) and SPICE model for the parametric analysis and efficient optimization of Micro Thermoresistive Convective Accelerometers (MTCA). The validated sensor model with 6 key parameters can predict (1) the sensor output, sensitivity and power consumption, (2) the optimal distance (pmbDo) between microheater and thermoresisitve temperature sensors, (3) the overheat temperature (ΔTh=Th-pmbTa), (4) membrane thickness (t), (5) the depth of cavity (h). This proposed model can significantly reduce CPU time compared with CFD model by a factor of 1.16 million (10h/0.031s). The optimized MTCA using the engine oil as the working fluid can achieve the sensitivity of 1,680μ Vg, nearly 10 times higher than the best MTCA reported in the literature.

Original languageEnglish
Title of host publicationNEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages245-248
Number of pages4
ISBN (Electronic)9781538652732
DOIs
Publication statusPublished - 3 Dec 2018
Event13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 - Singapore, Singapore
Duration: 22 Apr 201826 Apr 2018

Other

Other13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018
CountrySingapore
CitySingapore
Period22/4/1826/4/18

Fingerprint

accelerometers
Accelerometers
optimization
sensitivity
working fluids
sensors
Sensors
SPICE
temperature sensors
Temperature sensors
charge flow devices
Program processors
Diesel engines
engines
Computational fluid dynamics
Electric power utilization
oils
membranes
Membranes
cavities

Keywords

  • ID theoretical model
  • Micro Thermal Convective Accelerometer
  • Prandtl Number
  • Rayleigh Number

ASJC Scopus subject areas

  • Biomedical Engineering
  • Electrical and Electronic Engineering
  • Instrumentation

Cite this

Wang, X., Xu, W., Lijin, B., Ahmed, M., Bermak, A., & Lee, Y. K. (2018). Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 245-248). [8556940] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2018.8556940

Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model. / Wang, Xiaoyi; Xu, Wei; Lijin, Beiqi; Ahmed, Moaaz; Bermak, Amine; Lee, Yi Kuen.

NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. p. 245-248 8556940.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wang, X, Xu, W, Lijin, B, Ahmed, M, Bermak, A & Lee, YK 2018, Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model. in NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 8556940, Institute of Electrical and Electronics Engineers Inc., pp. 245-248, 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018, Singapore, Singapore, 22/4/18. https://doi.org/10.1109/NEMS.2018.8556940
Wang X, Xu W, Lijin B, Ahmed M, Bermak A, Lee YK. Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc. 2018. p. 245-248. 8556940 https://doi.org/10.1109/NEMS.2018.8556940
Wang, Xiaoyi ; Xu, Wei ; Lijin, Beiqi ; Ahmed, Moaaz ; Bermak, Amine ; Lee, Yi Kuen. / Parametric Analysis and Efficient Optimization of Micro Thermal Convective Accelerometers with Excellent Sensitivity Using a Validated 1-D Model. NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 245-248
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