On the structure of deposited diamond-like carbon films produced by Rf (13.56MHz) CH4 plasma

M. Ouchabane, M. Kechouane, K. Henda, H. Salah, B. Touchrift, Nouar Tabet

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Plasma enhanced chemical vapour deposition technique is used to grow diamond-like carbon films using pure methane gas plasma. It is known that the structure of the deposited films is largely influenced by the self-bias voltage values and thereafter all the film properties are a function of the structure; this concerns hydrogen concentration and sp3/sp2 hybridisation ratio in DLC films. Then monitoring DLC film properties requires the control of hydrogen concentration and hybridisation rates. This investigation is focused on the study of the structure changes upon the deposition conditions. The correlation between the structure and the deposition conditions was investigated by using various characterization techniques. Fourier Transform Infra-Red Spectroscopy (FTIR) was used to analyse the absorption of optically active hydrogen in the DLC films. The deconvolution of 2900cm-1 absorption band allows the analysis of all different hybridisations and configurations forming the structure. The total quantity of hydrogen in the film is evaluated by Elastic Recoil Detection Analysis (ERDA). The quantification of sp2 and sp3 concentrations is done from X-ray Photoelectron Spectroscopy (XPS). XPS measurements show that DLC films with high quantity of sp3 hybridisation can be obtained. The discussion and interpretation of these results leads to a better understanding of the relationship between structure and deposition conditions, which, in return, helps us in synthesizing films of desired properties.

Original languageEnglish
Title of host publicationAIP Conference Proceedings
Pages123-126
Number of pages4
Volume1047
DOIs
Publication statusPublished - 22 Oct 2008
Externally publishedYes
Event1st International Conference on Laser and Plasma Applications in Materials Science, LAPAMS 2008 - Algiers, Algeria
Duration: 23 Jun 200826 Jun 2008

Other

Other1st International Conference on Laser and Plasma Applications in Materials Science, LAPAMS 2008
CountryAlgeria
CityAlgiers
Period23/6/0826/6/08

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Keywords

  • Characterization
  • Diamond-like
  • PECVD
  • Structure

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Ouchabane, M., Kechouane, M., Henda, K., Salah, H., Touchrift, B., & Tabet, N. (2008). On the structure of deposited diamond-like carbon films produced by Rf (13.56MHz) CH4 plasma. In AIP Conference Proceedings (Vol. 1047, pp. 123-126) https://doi.org/10.1063/1.2999914