On the nonlinear dynamics of electromagnetically transduced microresonators

Andrew B. Sabater, Vijay Kumar, Aamer Mahmoud, Jeffrey F. Rhoads

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

This paper investigates the dynamics of electromagnetically actuated and sensed microresonators. These resonators consist of a silicon microcantilever and a current-carrying metallic wire loop. When placed in a permanent magnetic field and an alternating current is supplied, the devices vibrate due to Lorentz interactions. These vibrations, in turn, induce an electromotive force, which can be correlated to the dynamic response of the device. The nature of this transduction process results in an intrinsic coupling between the system's input and output, which must be analytically and experimentally characterized to fully understand the dynamics of the devices of interest. This paper seeks to address this need through the modeling, analysis, and experimental characterization of the nonlinear response of electromagnetically transduced microcantilevers in the presence of inductive and resistive coupling between the devices' input and output ports. A complete understanding of this behavior should enable the application of electromagnetically transduced microsystems in practical contexts ranging from resonant mass sensing to micromechanical signal processing. [2012-0223]

Original languageEnglish
Article number6517470
Pages (from-to)1020-1031
Number of pages12
JournalJournal of Microelectromechanical Systems
Volume22
Issue number5
DOIs
Publication statusPublished - 2013
Externally publishedYes

Fingerprint

Electromotive force
Microsystems
Dynamic response
Resonators
Signal processing
Wire
Magnetic fields
Silicon

Keywords

  • Electromagnetically transduced
  • Input/output coupling
  • MEMS
  • Nonlinear

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

On the nonlinear dynamics of electromagnetically transduced microresonators. / Sabater, Andrew B.; Kumar, Vijay; Mahmoud, Aamer; Rhoads, Jeffrey F.

In: Journal of Microelectromechanical Systems, Vol. 22, No. 5, 6517470, 2013, p. 1020-1031.

Research output: Contribution to journalArticle

Sabater, Andrew B. ; Kumar, Vijay ; Mahmoud, Aamer ; Rhoads, Jeffrey F. / On the nonlinear dynamics of electromagnetically transduced microresonators. In: Journal of Microelectromechanical Systems. 2013 ; Vol. 22, No. 5. pp. 1020-1031.
@article{c1d8bdf945c14684adfa6684aef87298,
title = "On the nonlinear dynamics of electromagnetically transduced microresonators",
abstract = "This paper investigates the dynamics of electromagnetically actuated and sensed microresonators. These resonators consist of a silicon microcantilever and a current-carrying metallic wire loop. When placed in a permanent magnetic field and an alternating current is supplied, the devices vibrate due to Lorentz interactions. These vibrations, in turn, induce an electromotive force, which can be correlated to the dynamic response of the device. The nature of this transduction process results in an intrinsic coupling between the system's input and output, which must be analytically and experimentally characterized to fully understand the dynamics of the devices of interest. This paper seeks to address this need through the modeling, analysis, and experimental characterization of the nonlinear response of electromagnetically transduced microcantilevers in the presence of inductive and resistive coupling between the devices' input and output ports. A complete understanding of this behavior should enable the application of electromagnetically transduced microsystems in practical contexts ranging from resonant mass sensing to micromechanical signal processing. [2012-0223]",
keywords = "Electromagnetically transduced, Input/output coupling, MEMS, Nonlinear",
author = "Sabater, {Andrew B.} and Vijay Kumar and Aamer Mahmoud and Rhoads, {Jeffrey F.}",
year = "2013",
doi = "10.1109/JMEMS.2013.2257986",
language = "English",
volume = "22",
pages = "1020--1031",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "5",

}

TY - JOUR

T1 - On the nonlinear dynamics of electromagnetically transduced microresonators

AU - Sabater, Andrew B.

AU - Kumar, Vijay

AU - Mahmoud, Aamer

AU - Rhoads, Jeffrey F.

PY - 2013

Y1 - 2013

N2 - This paper investigates the dynamics of electromagnetically actuated and sensed microresonators. These resonators consist of a silicon microcantilever and a current-carrying metallic wire loop. When placed in a permanent magnetic field and an alternating current is supplied, the devices vibrate due to Lorentz interactions. These vibrations, in turn, induce an electromotive force, which can be correlated to the dynamic response of the device. The nature of this transduction process results in an intrinsic coupling between the system's input and output, which must be analytically and experimentally characterized to fully understand the dynamics of the devices of interest. This paper seeks to address this need through the modeling, analysis, and experimental characterization of the nonlinear response of electromagnetically transduced microcantilevers in the presence of inductive and resistive coupling between the devices' input and output ports. A complete understanding of this behavior should enable the application of electromagnetically transduced microsystems in practical contexts ranging from resonant mass sensing to micromechanical signal processing. [2012-0223]

AB - This paper investigates the dynamics of electromagnetically actuated and sensed microresonators. These resonators consist of a silicon microcantilever and a current-carrying metallic wire loop. When placed in a permanent magnetic field and an alternating current is supplied, the devices vibrate due to Lorentz interactions. These vibrations, in turn, induce an electromotive force, which can be correlated to the dynamic response of the device. The nature of this transduction process results in an intrinsic coupling between the system's input and output, which must be analytically and experimentally characterized to fully understand the dynamics of the devices of interest. This paper seeks to address this need through the modeling, analysis, and experimental characterization of the nonlinear response of electromagnetically transduced microcantilevers in the presence of inductive and resistive coupling between the devices' input and output ports. A complete understanding of this behavior should enable the application of electromagnetically transduced microsystems in practical contexts ranging from resonant mass sensing to micromechanical signal processing. [2012-0223]

KW - Electromagnetically transduced

KW - Input/output coupling

KW - MEMS

KW - Nonlinear

UR - http://www.scopus.com/inward/record.url?scp=84885188481&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885188481&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2013.2257986

DO - 10.1109/JMEMS.2013.2257986

M3 - Article

VL - 22

SP - 1020

EP - 1031

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

M1 - 6517470

ER -