Negative charge emission due to excimer laser bombardment of sodium trisilicate glass

S. C. Langford, L. C. Jensen, J. T. Dickinson, L. R. Pederson

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

We describe measurements of negative charge emission accompanying irradiation of sodium trisilicate glass (Na2O·3SiO 2) with 248-nm excimer laser light at fluences on the order of 2 J/cm2 per pulse, i.e., at the threshold for ablative etching of the glass surface. The negative charge emission consists of a very prompt photoelectron burst coincident with the laser pulse, followed by a much slower plume of electrons and negative ions traveling with a high density cloud of positive ions, previously identified as primarily Na+. Using combinations of E and B fields in conjunction with time-of-flight methods, the negative ions were successfully separated from the plume and tentatively identified as O-, Si-, NaO-, and perhaps NaSi-. These negative species are probably formed by gas phase collisions in the near-surface region which result in electron attachment.

Original languageEnglish
Pages (from-to)4253-4257
Number of pages5
JournalJournal of Applied Physics
Volume68
Issue number8
DOIs
Publication statusPublished - 1990
Externally publishedYes

Fingerprint

negative ions
excimer lasers
plumes
bombardment
sodium
glass
electron attachment
pulses
positive ions
bursts
fluence
photoelectrons
etching
vapor phases
irradiation
collisions
thresholds
lasers
ions
electrons

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Langford, S. C., Jensen, L. C., Dickinson, J. T., & Pederson, L. R. (1990). Negative charge emission due to excimer laser bombardment of sodium trisilicate glass. Journal of Applied Physics, 68(8), 4253-4257. https://doi.org/10.1063/1.346216

Negative charge emission due to excimer laser bombardment of sodium trisilicate glass. / Langford, S. C.; Jensen, L. C.; Dickinson, J. T.; Pederson, L. R.

In: Journal of Applied Physics, Vol. 68, No. 8, 1990, p. 4253-4257.

Research output: Contribution to journalArticle

Langford, SC, Jensen, LC, Dickinson, JT & Pederson, LR 1990, 'Negative charge emission due to excimer laser bombardment of sodium trisilicate glass', Journal of Applied Physics, vol. 68, no. 8, pp. 4253-4257. https://doi.org/10.1063/1.346216
Langford, S. C. ; Jensen, L. C. ; Dickinson, J. T. ; Pederson, L. R. / Negative charge emission due to excimer laser bombardment of sodium trisilicate glass. In: Journal of Applied Physics. 1990 ; Vol. 68, No. 8. pp. 4253-4257.
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