Nanofabrication facilities: A study of characteristics and charging models

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationAnnual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009
Pages265-288
Number of pages24
Volume1
Publication statusPublished - 2009
Externally publishedYes
Event55th Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009 - Schaumburg, IL, United States
Duration: 4 May 20097 May 2009

Other

Other55th Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009
CountryUnited States
CitySchaumburg, IL
Period4/5/097/5/09

ASJC Scopus subject areas

  • Environmental Science(all)

Cite this

Mahmoud, A. (2009). Nanofabrication facilities: A study of characteristics and charging models. In Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009 (Vol. 1, pp. 265-288)

Nanofabrication facilities : A study of characteristics and charging models. / Mahmoud, Aamer.

Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009. Vol. 1 2009. p. 265-288.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mahmoud, A 2009, Nanofabrication facilities: A study of characteristics and charging models. in Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009. vol. 1, pp. 265-288, 55th Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009, Schaumburg, IL, United States, 4/5/09.
Mahmoud A. Nanofabrication facilities: A study of characteristics and charging models. In Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009. Vol. 1. 2009. p. 265-288
Mahmoud, Aamer. / Nanofabrication facilities : A study of characteristics and charging models. Annual Technical Meeting of the Institute of Environmental Sciences and Technology 2009, ESTECH 2009. Vol. 1 2009. pp. 265-288
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