MOCVD of HTS and GMR perovskites by aerosol and liquid delivery MOCVD

K. H. Dahmen, M. W. Carris

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Aerosol and liquid delivery MOCVD are techniques that were developed to overcome the problems with thermally less stable alkaline earth metal precursors in the deposition of alkaline earth doped HTS and GMR perovskites. In this paper, we will discuss the advantages and disadvantages of these techniques compared to the conventional MOCVD process. The deposition of CeO2, films as an intermediate buffer layer for the deposition of YBa2Cu3O7 on (1102) sapphire with Aerosol MOCVD will be discussed, as well as the deposition of alkaline earth doped Ianthanum manganites, La1-xMxMnO3 (M=Ca, Sr) on LaAlO3, MgO and YSZ by liquid delivery MOCVD.

Original languageEnglish
Pages (from-to)270-277
Number of pages8
JournalJournal of Alloys and Compounds
Volume251
Issue number1-2
DOIs
Publication statusPublished - Apr 1997

    Fingerprint

Keywords

  • MOCVD
  • Magnetoresistance

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Metals and Alloys
  • Materials Chemistry

Cite this