Microstructural developments and dielectric properties of rapid thermally processed PZT thin films derived by metallo-organic decomposition

Said Mansour, Gerald L. Liedl, Robert W. Vest

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Microstructural developments and dielectric properties of lead zirconate titanate thin films (0.22 μm) with the composition Pb(Zr0.53Ti0.47)O3 were studied. The films were prepared by metallo-organic decomposition (MOD) and rapid thermal processing (RTP) in the temperature range 475-825°C for 2 min in an oxygen gas flow with and without post-annealing. An amorphous-pyrochlore-perovskite phase transformation is indicated at or below 525°C RTP temperatures while a direct amorphous-to-perovskite phase transformation is indicated at higher RTP temperatures. A decrease in grain size with increasing temperature is correlated with an increase in and dominance of nucleation of perovskite sites. The best dielectric and fatigue properties were exhibited by films processed in the temperature range 725-775°C. Hysteresis loops tended toward squareness and polarization charges increased with increased temperature. Furthermore, 45% of the initial charge remained after 109 switching reversals. A degradation, however, was observed in both properties at higher temperatures.

Original languageEnglish
Pages (from-to)1617-1623
Number of pages7
JournalJournal of the American Ceramic Society
Volume78
Issue number6
Publication statusPublished - 1 Jun 1995
Externally publishedYes

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dielectric property
Dielectric properties
decomposition
Decomposition
Thin films
Rapid thermal processing
perovskite
Perovskite
temperature
Temperature
pyrochlore
titanate
Phase transitions
annealing
hysteresis
gas flow
fatigue
nucleation
Hysteresis loops
grain size

ASJC Scopus subject areas

  • Ceramics and Composites

Cite this

Microstructural developments and dielectric properties of rapid thermally processed PZT thin films derived by metallo-organic decomposition. / Mansour, Said; Liedl, Gerald L.; Vest, Robert W.

In: Journal of the American Ceramic Society, Vol. 78, No. 6, 01.06.1995, p. 1617-1623.

Research output: Contribution to journalArticle

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