Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates

Aamer Mahmoud, Shadi Dayeh, Donald P. Butler, Zeynep Çelik-Butler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

This paper presents work on micromachined infrared detectors on flexible substrates. The detectors are made of semiconducting yttrium-barium-copper-oxide (YBCO) and are built on a 40-50 um layer of polyimide (PI58578G) that serves as the flexible substrate. Two variants of micromachined infrared detectors have been fabricated. The first variant employs a mesa structure in which self-supporting Ti arms hold up the detector pixel. The second variant has a more planar topology with the detector being supported by a layer of silicon nitride. Surface micromachining is used to isolate the detectors from the substrate. After fabrication the polyimide is peeled off the carrier wafer and the devices are packaged and characterized. The 40×40 μm2 microbolometers have responsivities ranging from 7.4×103 V/W to 104 V/W and detectivities ranging from 6.6×105 cm-Hz1/2/W to 108 cm-Hz1/2/W. These results are comparable to those obtained for devices made on a rigid silicon substrate. The effect of substrate heating is also investigated and found not to affect the detector performance.

Original languageEnglish
Title of host publicationProceedings of IEEE Sensors
Pages777-782
Number of pages6
Volume2
Edition2
Publication statusPublished - 2003
Externally publishedYes
EventSecond IEEE International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada
Duration: 22 Oct 200324 Oct 2003

Other

OtherSecond IEEE International Conference on Sensors: IEEE Sensors 2003
CountryCanada
CityToronto, Ont.
Period22/10/0324/10/03

Fingerprint

Sensor arrays
Polyimides
Infrared radiation
Detectors
Substrates
Infrared detectors
Yttrium barium copper oxides
Surface micromachining
Silicon nitride
Pixels
Topology
Heating
Fabrication
Silicon

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering

Cite this

Mahmoud, A., Dayeh, S., Butler, D. P., & Çelik-Butler, Z. (2003). Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates. In Proceedings of IEEE Sensors (2 ed., Vol. 2, pp. 777-782)

Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates. / Mahmoud, Aamer; Dayeh, Shadi; Butler, Donald P.; Çelik-Butler, Zeynep.

Proceedings of IEEE Sensors. Vol. 2 2. ed. 2003. p. 777-782.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mahmoud, A, Dayeh, S, Butler, DP & Çelik-Butler, Z 2003, Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates. in Proceedings of IEEE Sensors. 2 edn, vol. 2, pp. 777-782, Second IEEE International Conference on Sensors: IEEE Sensors 2003, Toronto, Ont., Canada, 22/10/03.
Mahmoud A, Dayeh S, Butler DP, Çelik-Butler Z. Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates. In Proceedings of IEEE Sensors. 2 ed. Vol. 2. 2003. p. 777-782
Mahmoud, Aamer ; Dayeh, Shadi ; Butler, Donald P. ; Çelik-Butler, Zeynep. / Micromachined Infrared Sensor Arrays on Flexible Polyimide Substrates. Proceedings of IEEE Sensors. Vol. 2 2. ed. 2003. pp. 777-782
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