Microfabrication process cost calculator

Aamer Mahmoud, Ron Reger

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The cost of fabricating micro-devices and systems is an important factor in the development of new products and systems. It is important for researchers to be able to budget expenses when submitting proposals. Likewise, it is also important from an operations point of view. The cost of running a typical Microelectromechanical (MEMS) process in eight different academic micro and nanofabrication facilities has been calculated by "virtually" performing fabrication processes at these facilities. The different charging mechanisms in place have been presented as have been different charge tiers and rates. Due to the different recharge structures, a computer application has been developed to streamline the cost estimation of fabrication.

Original languageEnglish
Title of host publicationBiennial University/Government/Industry Microelectronics Symposium - Proceedings
DOIs
Publication statusPublished - 2010
Externally publishedYes
Event18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - West Lafayette, IN, United States
Duration: 28 Jun 20101 Jul 2010

Other

Other18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010
CountryUnited States
CityWest Lafayette, IN
Period28/6/101/7/10

Fingerprint

Microfabrication
Costs
Fabrication
Computer applications
Nanotechnology
MEMS

Keywords

  • MEMS
  • Microfabrication
  • Nanofabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Mahmoud, A., & Reger, R. (2010). Microfabrication process cost calculator. In Biennial University/Government/Industry Microelectronics Symposium - Proceedings [5508855] https://doi.org/10.1109/UGIM.2010.5508855

Microfabrication process cost calculator. / Mahmoud, Aamer; Reger, Ron.

Biennial University/Government/Industry Microelectronics Symposium - Proceedings. 2010. 5508855.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Mahmoud, A & Reger, R 2010, Microfabrication process cost calculator. in Biennial University/Government/Industry Microelectronics Symposium - Proceedings., 5508855, 18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010, West Lafayette, IN, United States, 28/6/10. https://doi.org/10.1109/UGIM.2010.5508855
Mahmoud A, Reger R. Microfabrication process cost calculator. In Biennial University/Government/Industry Microelectronics Symposium - Proceedings. 2010. 5508855 https://doi.org/10.1109/UGIM.2010.5508855
Mahmoud, Aamer ; Reger, Ron. / Microfabrication process cost calculator. Biennial University/Government/Industry Microelectronics Symposium - Proceedings. 2010.
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