Microfabrication process cost calculator

Aamer Mahmood, Ron Reger

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The cost of fabricating micro-devices and systems is an important factor in the development of new products and systems. It is important for researchers to be able to budget expenses when submitting proposals. Likewise, it is also important from an operations point of view. The cost of running a typical Microelectromechanical (MEMS) process in eight different academic micro and nanofabrication facilities has been calculated by "virtually" performing fabrication processes at these facilities. The different charging mechanisms in place have been presented as have been different charge tiers and rates. Due to the different recharge structures, a computer application has been developed to streamline the cost estimation of fabrication.

Original languageEnglish
Title of host publication2010 18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - Proceedings
DOIs
Publication statusPublished - 24 Aug 2010
Event18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - West Lafayette, IN, United States
Duration: 28 Jun 20101 Jul 2010

Publication series

NameBiennial University/Government/Industry Microelectronics Symposium - Proceedings
ISSN (Print)0749-6877

Other

Other18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010
CountryUnited States
CityWest Lafayette, IN
Period28/6/101/7/10

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Keywords

  • MEMS
  • Microfabrication
  • Nanofabrication

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Mahmood, A., & Reger, R. (2010). Microfabrication process cost calculator. In 2010 18th Biennial University/Government/Industry Micro-Nano Symposium, UGIM 2010 - Proceedings [5508855] (Biennial University/Government/Industry Microelectronics Symposium - Proceedings). https://doi.org/10.1109/UGIM.2010.5508855