MEMS aluminum nitride trampoline resonators in pairs and quads for UHF filtering applications: Computational performance

Annie Ruimi, Yueming Liang, Robert M. McMeeking

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Piezoelectric filtering devices with micro-scale dimensions are excellent candidates for reaching the ultra-high-frequencies (UHF) needed in wireless communication systems. A multidisciplinary team at UCSB has collaborated to design, fabricate and characterize experimentally as well as numerically the performance of a filter consisting of an assembly of aluminum nitride trampoline-resonators approximately 300 μm in diameter and 2 μm thick and responding to longitudinal vibrations. In this paper, we report on the numerical results obtained with finite element simulations. We analyze if and how, assembling the resonators in pairs and quads affects the performance of the device. It is found that i) the array arrangement is not responsible for the degradation of the Q-factor (Qμ2000), ii) highest values of the electromechanical coupling coefficient (K 2= 6.1%) are obtained when the resonators are separated by the longest slabs and iii) the K 2 of each resonator adds up to the K 2 of a single resonator.

Original languageEnglish
Title of host publicationAdvances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 7th International Conference
Pages41-49
Number of pages9
Publication statusPublished - 1 Dec 2011
Event7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011 - Milan, Italy
Duration: 4 Jul 20118 Jul 2011

Publication series

NameAES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications
ISSN (Print)1924-3642

Other

Other7th International Conference on Advances and Trends in Engineering Materials and their Applications, AES-ATEMA'2011
CountryItaly
CityMilan
Period4/7/118/7/11

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Keywords

  • Acoustic resonators
  • Aluminum nitride
  • Filters
  • Finite element simulations
  • MEMS
  • Piezoelectric films

ASJC Scopus subject areas

  • Mechanics of Materials
  • Materials Science(all)

Cite this

Ruimi, A., Liang, Y., & McMeeking, R. M. (2011). MEMS aluminum nitride trampoline resonators in pairs and quads for UHF filtering applications: Computational performance. In Advances and Trends in Engineering Materials and their Applications - Proceedings of AES-ATEMA'2011 7th International Conference (pp. 41-49). (AES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications).