Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness

N. Karanjgaokar, K. Jonnalagadda, I. Chasiotis, J. Chee, Aamer Mahmoud, D. Peroulis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Gold thin films are widely employed as structural and electrical contact elements in RF-MEMS. A comprehensive experimental investigation was carried out by uniaxial tension experiments to extract the strain rate dependent mechanical behavior of nanocrystalline Au films in the range of 10-6 - 10 -1 s-1 full-field strain measurements were obtained with the aid of a fine speckle pattern (1 urn particle size) that assisted the use of digital image correlation. Our microscale tension experiments on Au films at different strain rates and for 0.83 μm and 1-76 μm thick specimens showed a clear monotonic increase in the elastic limit (≤ 640 MPa), yield stress (≤ 901 MPa), and ultimate tensile strength (≤ 938 MPa) with increasing loading rate. The nanocrystalline films demonstrated very large strengths and ductility: at the slowest strain rate, the ultimate failure strain was as high as 7%. Finally, the elastic modulus was not affected by the strain rate, E= 69.1 ± 2.1 GPa, and demonstrated small scatter across all strain rates.

Original languageEnglish
Title of host publicationSociety for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
Pages1860-1866
Number of pages7
Volume4
Publication statusPublished - 2008
Externally publishedYes
Event11th International Congress and Exhibition on Experimental and Applied Mechanics 2008 - Orlando, FL, United States
Duration: 2 Jun 20085 Jun 2008

Other

Other11th International Congress and Exhibition on Experimental and Applied Mechanics 2008
CountryUnited States
CityOrlando, FL
Period2/6/085/6/08

Fingerprint

Film thickness
Strain rate
Strain measurement
Speckle
MEMS
Yield stress
Ductility
Tensile strength
Gold
Elastic moduli
Experiments
Particle size
Thin films

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Karanjgaokar, N., Jonnalagadda, K., Chasiotis, I., Chee, J., Mahmoud, A., & Peroulis, D. (2008). Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness. In Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008 (Vol. 4, pp. 1860-1866)

Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness. / Karanjgaokar, N.; Jonnalagadda, K.; Chasiotis, I.; Chee, J.; Mahmoud, Aamer; Peroulis, D.

Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008. Vol. 4 2008. p. 1860-1866.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Karanjgaokar, N, Jonnalagadda, K, Chasiotis, I, Chee, J, Mahmoud, A & Peroulis, D 2008, Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness. in Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008. vol. 4, pp. 1860-1866, 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008, Orlando, FL, United States, 2/6/08.
Karanjgaokar N, Jonnalagadda K, Chasiotis I, Chee J, Mahmoud A, Peroulis D. Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness. In Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008. Vol. 4. 2008. p. 1860-1866
Karanjgaokar, N. ; Jonnalagadda, K. ; Chasiotis, I. ; Chee, J. ; Mahmoud, Aamer ; Peroulis, D. / Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness. Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008. Vol. 4 2008. pp. 1860-1866
@inproceedings{fa184c2110b644dc93e513c8903cf115,
title = "Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness",
abstract = "Gold thin films are widely employed as structural and electrical contact elements in RF-MEMS. A comprehensive experimental investigation was carried out by uniaxial tension experiments to extract the strain rate dependent mechanical behavior of nanocrystalline Au films in the range of 10-6 - 10 -1 s-1 full-field strain measurements were obtained with the aid of a fine speckle pattern (1 urn particle size) that assisted the use of digital image correlation. Our microscale tension experiments on Au films at different strain rates and for 0.83 μm and 1-76 μm thick specimens showed a clear monotonic increase in the elastic limit (≤ 640 MPa), yield stress (≤ 901 MPa), and ultimate tensile strength (≤ 938 MPa) with increasing loading rate. The nanocrystalline films demonstrated very large strengths and ductility: at the slowest strain rate, the ultimate failure strain was as high as 7{\%}. Finally, the elastic modulus was not affected by the strain rate, E= 69.1 ± 2.1 GPa, and demonstrated small scatter across all strain rates.",
author = "N. Karanjgaokar and K. Jonnalagadda and I. Chasiotis and J. Chee and Aamer Mahmoud and D. Peroulis",
year = "2008",
language = "English",
isbn = "9781605604152",
volume = "4",
pages = "1860--1866",
booktitle = "Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008",

}

TY - GEN

T1 - Mechanical behavior of nanocrystalline Au films as a function of strain rate and film thickness

AU - Karanjgaokar, N.

AU - Jonnalagadda, K.

AU - Chasiotis, I.

AU - Chee, J.

AU - Mahmoud, Aamer

AU - Peroulis, D.

PY - 2008

Y1 - 2008

N2 - Gold thin films are widely employed as structural and electrical contact elements in RF-MEMS. A comprehensive experimental investigation was carried out by uniaxial tension experiments to extract the strain rate dependent mechanical behavior of nanocrystalline Au films in the range of 10-6 - 10 -1 s-1 full-field strain measurements were obtained with the aid of a fine speckle pattern (1 urn particle size) that assisted the use of digital image correlation. Our microscale tension experiments on Au films at different strain rates and for 0.83 μm and 1-76 μm thick specimens showed a clear monotonic increase in the elastic limit (≤ 640 MPa), yield stress (≤ 901 MPa), and ultimate tensile strength (≤ 938 MPa) with increasing loading rate. The nanocrystalline films demonstrated very large strengths and ductility: at the slowest strain rate, the ultimate failure strain was as high as 7%. Finally, the elastic modulus was not affected by the strain rate, E= 69.1 ± 2.1 GPa, and demonstrated small scatter across all strain rates.

AB - Gold thin films are widely employed as structural and electrical contact elements in RF-MEMS. A comprehensive experimental investigation was carried out by uniaxial tension experiments to extract the strain rate dependent mechanical behavior of nanocrystalline Au films in the range of 10-6 - 10 -1 s-1 full-field strain measurements were obtained with the aid of a fine speckle pattern (1 urn particle size) that assisted the use of digital image correlation. Our microscale tension experiments on Au films at different strain rates and for 0.83 μm and 1-76 μm thick specimens showed a clear monotonic increase in the elastic limit (≤ 640 MPa), yield stress (≤ 901 MPa), and ultimate tensile strength (≤ 938 MPa) with increasing loading rate. The nanocrystalline films demonstrated very large strengths and ductility: at the slowest strain rate, the ultimate failure strain was as high as 7%. Finally, the elastic modulus was not affected by the strain rate, E= 69.1 ± 2.1 GPa, and demonstrated small scatter across all strain rates.

UR - http://www.scopus.com/inward/record.url?scp=57649155346&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=57649155346&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781605604152

VL - 4

SP - 1860

EP - 1866

BT - Society for Experimental Mechanics - 11th International Congress and Exhibition on Experimental and Applied Mechanics 2008

ER -