Lateral Ordering of Microfabricated SiO2 Nanotips

Laxmikant Saraf, James Young, Scott Lea, S. Thevuthasan, Glen Dunham, Jay W. Grate, Donald R. Baer

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Microfabricated SiO2 nanotips are potentially useful as scanning tips in near-field optical microscopy and sensor related functions. We report a process in which the rounding nature of isotropic etching combined with undercutting property of Si(100) are effectively used to microfabricate laterally ordered SiO2 nanotips. Combination of excessive isotropic wet etching of thermally grown SiO2 with anisotropic etching of n-type silicon along (100) planes leads to the formation of nanotips with sharpness ∼15 nm. Uniform periodic array of nanotips form due to coalescence of excessively etched SiO2 resulting in nanotips length ≤ the separation between the original photolithographic features. Finally, the overall process of nanotip formation is discussed by considering the roles of rapid isotropic etching of SiO2 in buffered oxide etch solution, anisotropic etching of Si〈100〉 in KOH solution, and slow SiO 2 etching in KOH solution.

Original languageEnglish
JournalElectrochemical and Solid-State Letters
Volume7
Issue number1
DOIs
Publication statusPublished - 2004
Externally publishedYes

Fingerprint

Nanotips
etching
Anisotropic etching
Etching
Wet etching
sharpness
Optical sensors
Silicon
Coalescence
Oxides
coalescing
Optical microscopy
near fields
microscopy
Scanning
scanning
oxides
sensors
silicon

ASJC Scopus subject areas

  • Electrochemistry
  • Materials Science(all)

Cite this

Saraf, L., Young, J., Lea, S., Thevuthasan, S., Dunham, G., Grate, J. W., & Baer, D. R. (2004). Lateral Ordering of Microfabricated SiO2 Nanotips. Electrochemical and Solid-State Letters, 7(1). https://doi.org/10.1149/1.1626291

Lateral Ordering of Microfabricated SiO2 Nanotips. / Saraf, Laxmikant; Young, James; Lea, Scott; Thevuthasan, S.; Dunham, Glen; Grate, Jay W.; Baer, Donald R.

In: Electrochemical and Solid-State Letters, Vol. 7, No. 1, 2004.

Research output: Contribution to journalArticle

Saraf, L, Young, J, Lea, S, Thevuthasan, S, Dunham, G, Grate, JW & Baer, DR 2004, 'Lateral Ordering of Microfabricated SiO2 Nanotips', Electrochemical and Solid-State Letters, vol. 7, no. 1. https://doi.org/10.1149/1.1626291
Saraf L, Young J, Lea S, Thevuthasan S, Dunham G, Grate JW et al. Lateral Ordering of Microfabricated SiO2 Nanotips. Electrochemical and Solid-State Letters. 2004;7(1). https://doi.org/10.1149/1.1626291
Saraf, Laxmikant ; Young, James ; Lea, Scott ; Thevuthasan, S. ; Dunham, Glen ; Grate, Jay W. ; Baer, Donald R. / Lateral Ordering of Microfabricated SiO2 Nanotips. In: Electrochemical and Solid-State Letters. 2004 ; Vol. 7, No. 1.
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