Laser detection of radiation enhanced electron transport in ultra-thin oxides

R. Pasternak, Y. V. Shirokaya, Z. Marka, J. K. Miller, Sergey Rashkeev, S. T. Pantelides, N. H. Tolk, B. K. Choi, R. D. Schrimpf, D. M. Fleetwood

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Electron transport in a variable-thickness ultra-thin SiO 2-on-Si structure (1.0-6.5nm) is observed to be enhanced substantially by X-ray radiation-induced damage as detected by a novel fast-pulsed laser technique. This method involves optically stimulated electron injection into the oxide followed by detection of transport, trapping and recombination rates using time-dependent electric-field induced second-harmonic generation (EFISH) arising from charge separation at the interface. This detection technique provides a contactless, noninvasive alternative to electrical characterization.

Original languageEnglish
Pages (from-to)150-155
Number of pages6
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume514
Issue number1-3
DOIs
Publication statusPublished - 21 Nov 2003
Externally publishedYes

Fingerprint

Electron injection
Harmonic generation
Pulsed lasers
Electric fields
Radiation
X rays
Oxides
oxides
Lasers
radiation
polarization (charge separation)
lasers
pulsed lasers
harmonic generations
electrons
trapping
injection
damage
electric fields
x rays

Keywords

  • 2-nd harmonic generation
  • Induced leakage current
  • Silicon
  • Thin gate oxides

ASJC Scopus subject areas

  • Instrumentation
  • Nuclear and High Energy Physics

Cite this

Laser detection of radiation enhanced electron transport in ultra-thin oxides. / Pasternak, R.; Shirokaya, Y. V.; Marka, Z.; Miller, J. K.; Rashkeev, Sergey; Pantelides, S. T.; Tolk, N. H.; Choi, B. K.; Schrimpf, R. D.; Fleetwood, D. M.

In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 514, No. 1-3, 21.11.2003, p. 150-155.

Research output: Contribution to journalArticle

Pasternak, R. ; Shirokaya, Y. V. ; Marka, Z. ; Miller, J. K. ; Rashkeev, Sergey ; Pantelides, S. T. ; Tolk, N. H. ; Choi, B. K. ; Schrimpf, R. D. ; Fleetwood, D. M. / Laser detection of radiation enhanced electron transport in ultra-thin oxides. In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2003 ; Vol. 514, No. 1-3. pp. 150-155.
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AU - Shirokaya, Y. V.

AU - Marka, Z.

AU - Miller, J. K.

AU - Rashkeev, Sergey

AU - Pantelides, S. T.

AU - Tolk, N. H.

AU - Choi, B. K.

AU - Schrimpf, R. D.

AU - Fleetwood, D. M.

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