Laser beam lithography of metal oxide electrodes for PZT memory applications

Jarrod L. Norton, Said Mansour, G. L. Liedl, Arden L. Bement, Elliott B. Slamovich, C. Venkatraman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Current metal/metal oxide patterning techniques typically involve photolithography, an expensive, time-consuming process, and/or a vacuum system, which also adds significantly to the cost. In this study, fabrication of metal oxide upper electrodes for Pb(Zr xTi 1x)O 3 (PZT) memories by metallorganic decomposition (MOD) was coupled with laser beam patterning. Metal oxide organic precursors were treated with an absorption-enhancing dye and were spun on to ferroelectric PZT films followed by selective area laser beam exposure. This technique was employed to pattern RuO 2 and (La,Sr)CoO 3 electrodes. A variety of patterns (dot, line, and circular) were prepared which demonstrates the suitability of laser patterning for a variety of applications. The minimum power density required to generate a continuous conductive oxide pattern was found to be approximately 2.5 kW/cm 2 at a scan speed of 25 mm/min. Resistivity values for the patterned lines were 660 Ω-cm for RuO 2 and 59 mΩ-cm for LSCO.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages99-104
Number of pages6
Volume380
Publication statusPublished - 1995
Externally publishedYes
EventProceedings of the 1995 MRS Spring Meeting - San Francisco, CA, USA
Duration: 17 Apr 199520 Apr 1995

Other

OtherProceedings of the 1995 MRS Spring Meeting
CitySan Francisco, CA, USA
Period17/4/9520/4/95

Fingerprint

Oxides
Lithography
Laser beams
Metals
Data storage equipment
Electrodes
Ferroelectric films
Photolithography
Coloring Agents
Dyes
Vacuum
Decomposition
Fabrication
Lasers
Costs

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Norton, J. L., Mansour, S., Liedl, G. L., Bement, A. L., Slamovich, E. B., & Venkatraman, C. (1995). Laser beam lithography of metal oxide electrodes for PZT memory applications. In Materials Research Society Symposium - Proceedings (Vol. 380, pp. 99-104). Materials Research Society.

Laser beam lithography of metal oxide electrodes for PZT memory applications. / Norton, Jarrod L.; Mansour, Said; Liedl, G. L.; Bement, Arden L.; Slamovich, Elliott B.; Venkatraman, C.

Materials Research Society Symposium - Proceedings. Vol. 380 Materials Research Society, 1995. p. 99-104.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Norton, JL, Mansour, S, Liedl, GL, Bement, AL, Slamovich, EB & Venkatraman, C 1995, Laser beam lithography of metal oxide electrodes for PZT memory applications. in Materials Research Society Symposium - Proceedings. vol. 380, Materials Research Society, pp. 99-104, Proceedings of the 1995 MRS Spring Meeting, San Francisco, CA, USA, 17/4/95.
Norton JL, Mansour S, Liedl GL, Bement AL, Slamovich EB, Venkatraman C. Laser beam lithography of metal oxide electrodes for PZT memory applications. In Materials Research Society Symposium - Proceedings. Vol. 380. Materials Research Society. 1995. p. 99-104
Norton, Jarrod L. ; Mansour, Said ; Liedl, G. L. ; Bement, Arden L. ; Slamovich, Elliott B. ; Venkatraman, C. / Laser beam lithography of metal oxide electrodes for PZT memory applications. Materials Research Society Symposium - Proceedings. Vol. 380 Materials Research Society, 1995. pp. 99-104
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