Irradiation-induced silicide formation in the ion beam-mixed Au/Si(1 0 0) system at room temperature

R. Khalfaoui, C. Benazzouz, A. Guittoum, Nouar Tabet, S. Tobbeche

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

The irradiation-induced silicide formation in an ion-beam-mixed layer of Au/Si(1 0 0) system was investigated by using 120 keV Ar+ ions to the fluences of 1×1016 and 3×1016 ions/cm 2 at room temperature. The thickness of Au layer evaporated on Si substrate was ∼500 Å. RBS experiments were carried out to study the irradiation effects on the mixed layer. We note that at a fluence of 1×1016 ions/cm2, total mixing of the Au layer with Si is obtained. A computer program is developed to extract the depth profiles of Au and Si atoms for each fluence. The depth profiles obtained for the fluence of 1×1016 ions/cm2 reveal two distinct regions. At the surface, we observe a mixed layer with homogenous concentrations of Au and Si atoms which is of the approximate composition of Au70Si 30. For the fluence of 3×1016 ions/cm2, the depth profiles of Au and Si atoms are similar except that the thickness of the interface between the Au70Si30 layer and Si substrate is reduced. The sample irradiated to the fluence of 3×1016 ions/cm2 was analyzed by X-ray photoelectron spectroscopy. The chemical shift of both Au 4f7/2 and Si 2p lines was measured. The XPS depth profiles of Au and Si atoms and the observed chemical shift of Au 4f and Si 2p lines confirmed the formation of gold silicide phases at the surface of the ion beam-mixed layer.

Original languageEnglish
Pages (from-to)223-227
Number of pages5
JournalVacuum
Volume78
Issue number2-4
DOIs
Publication statusPublished - 30 May 2005
Externally publishedYes

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Ion beams
ion beams
Irradiation
fluence
Ions
irradiation
room temperature
Atoms
Chemical shift
ions
Temperature
profiles
X ray photoelectron spectroscopy
chemical equilibrium
atoms
Substrates
Gold
Computer program listings
photoelectron spectroscopy
gold

Keywords

  • Gold silicide
  • Ion-beam mixing
  • Rutherford backscattering spectrometry
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Irradiation-induced silicide formation in the ion beam-mixed Au/Si(1 0 0) system at room temperature. / Khalfaoui, R.; Benazzouz, C.; Guittoum, A.; Tabet, Nouar; Tobbeche, S.

In: Vacuum, Vol. 78, No. 2-4, 30.05.2005, p. 223-227.

Research output: Contribution to journalArticle

Khalfaoui, R. ; Benazzouz, C. ; Guittoum, A. ; Tabet, Nouar ; Tobbeche, S. / Irradiation-induced silicide formation in the ion beam-mixed Au/Si(1 0 0) system at room temperature. In: Vacuum. 2005 ; Vol. 78, No. 2-4. pp. 223-227.
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