Investigation of thermal recovery behavior in hydrogen-implanted SrTiO3 using high energy ion beam techniques

S. Thevuthasan, W. Jiang, J. S. Young, W. J. Weber

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Damage accumulation, recovery process, and the influence of hydrogen on the recovery process have been investigated in single crystal SrTiO3 irradiated with low-energy (40 keV) H+ using in-situ hydrogen nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry/channeling (RBS/C) techniques. Samples were irradiated at a temperature of 120 K with ion fluences of 5.0 × 1016 and 1.0 × 1017 H+/cm2. For annealing temperatures up to approx. 470 K, disochronal annealing results indicate increasing disorder on the Sr, Ti, and O sublattices with temperature in the vicinity of the implanted hydrogen for low fluences of 5.0 × 1016 H+/cm2. Annealing this sample above 570 K, resulted in the cleavage of the entire irradiated surface. On-the-other-hand, high-temperature isochronal annealing results for 1.0 × 1017 H+/cm2 fluence show an increase in the backscattering yield across the penetration depth of the implant hydrogen due to the formation of hydrogen blisters.

Original languageEnglish
Pages (from-to)544-548
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume161
DOIs
Publication statusPublished - Mar 2000
Externally publishedYes

Fingerprint

Ion beams
Hydrogen
recovery
ion beams
Recovery
Annealing
hydrogen
fluence
annealing
backscattering
energy
blisters
Temperature
Nuclear reactions
Rutherford backscattering spectroscopy
Backscattering
nuclear reactions
Spectrometry
sublattices
temperature

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Investigation of thermal recovery behavior in hydrogen-implanted SrTiO3 using high energy ion beam techniques. / Thevuthasan, S.; Jiang, W.; Young, J. S.; Weber, W. J.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 161, 03.2000, p. 544-548.

Research output: Contribution to journalArticle

@article{d4e16b3c29894152a43c89baff422d4c,
title = "Investigation of thermal recovery behavior in hydrogen-implanted SrTiO3 using high energy ion beam techniques",
abstract = "Damage accumulation, recovery process, and the influence of hydrogen on the recovery process have been investigated in single crystal SrTiO3 irradiated with low-energy (40 keV) H+ using in-situ hydrogen nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry/channeling (RBS/C) techniques. Samples were irradiated at a temperature of 120 K with ion fluences of 5.0 × 1016 and 1.0 × 1017 H+/cm2. For annealing temperatures up to approx. 470 K, disochronal annealing results indicate increasing disorder on the Sr, Ti, and O sublattices with temperature in the vicinity of the implanted hydrogen for low fluences of 5.0 × 1016 H+/cm2. Annealing this sample above 570 K, resulted in the cleavage of the entire irradiated surface. On-the-other-hand, high-temperature isochronal annealing results for 1.0 × 1017 H+/cm2 fluence show an increase in the backscattering yield across the penetration depth of the implant hydrogen due to the formation of hydrogen blisters.",
author = "S. Thevuthasan and W. Jiang and Young, {J. S.} and Weber, {W. J.}",
year = "2000",
month = "3",
doi = "10.1016/S0168-583X(99)00841-1",
language = "English",
volume = "161",
pages = "544--548",
journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Investigation of thermal recovery behavior in hydrogen-implanted SrTiO3 using high energy ion beam techniques

AU - Thevuthasan, S.

AU - Jiang, W.

AU - Young, J. S.

AU - Weber, W. J.

PY - 2000/3

Y1 - 2000/3

N2 - Damage accumulation, recovery process, and the influence of hydrogen on the recovery process have been investigated in single crystal SrTiO3 irradiated with low-energy (40 keV) H+ using in-situ hydrogen nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry/channeling (RBS/C) techniques. Samples were irradiated at a temperature of 120 K with ion fluences of 5.0 × 1016 and 1.0 × 1017 H+/cm2. For annealing temperatures up to approx. 470 K, disochronal annealing results indicate increasing disorder on the Sr, Ti, and O sublattices with temperature in the vicinity of the implanted hydrogen for low fluences of 5.0 × 1016 H+/cm2. Annealing this sample above 570 K, resulted in the cleavage of the entire irradiated surface. On-the-other-hand, high-temperature isochronal annealing results for 1.0 × 1017 H+/cm2 fluence show an increase in the backscattering yield across the penetration depth of the implant hydrogen due to the formation of hydrogen blisters.

AB - Damage accumulation, recovery process, and the influence of hydrogen on the recovery process have been investigated in single crystal SrTiO3 irradiated with low-energy (40 keV) H+ using in-situ hydrogen nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry/channeling (RBS/C) techniques. Samples were irradiated at a temperature of 120 K with ion fluences of 5.0 × 1016 and 1.0 × 1017 H+/cm2. For annealing temperatures up to approx. 470 K, disochronal annealing results indicate increasing disorder on the Sr, Ti, and O sublattices with temperature in the vicinity of the implanted hydrogen for low fluences of 5.0 × 1016 H+/cm2. Annealing this sample above 570 K, resulted in the cleavage of the entire irradiated surface. On-the-other-hand, high-temperature isochronal annealing results for 1.0 × 1017 H+/cm2 fluence show an increase in the backscattering yield across the penetration depth of the implant hydrogen due to the formation of hydrogen blisters.

UR - http://www.scopus.com/inward/record.url?scp=0033905581&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033905581&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(99)00841-1

DO - 10.1016/S0168-583X(99)00841-1

M3 - Article

AN - SCOPUS:0033905581

VL - 161

SP - 544

EP - 548

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

ER -