Investigation of thermal recovery behavior in hydrogen-implanted SrTiO3 using high energy ion beam techniques

S. Thevuthasan, W. Jiang, J. S. Young, W. J. Weber

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    Abstract

    Damage accumulation, recovery process, and the influence of hydrogen on the recovery process have been investigated in single crystal SrTiO3 irradiated with low-energy (40 keV) H+ using in-situ hydrogen nuclear reaction analysis (NRA) and Rutherford backscattering spectrometry/channeling (RBS/C) techniques. Samples were irradiated at a temperature of 120 K with ion fluences of 5.0 × 1016 and 1.0 × 1017 H+/cm2. For annealing temperatures up to approx. 470 K, disochronal annealing results indicate increasing disorder on the Sr, Ti, and O sublattices with temperature in the vicinity of the implanted hydrogen for low fluences of 5.0 × 1016 H+/cm2. Annealing this sample above 570 K, resulted in the cleavage of the entire irradiated surface. On-the-other-hand, high-temperature isochronal annealing results for 1.0 × 1017 H+/cm2 fluence show an increase in the backscattering yield across the penetration depth of the implant hydrogen due to the formation of hydrogen blisters.

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    ASJC Scopus subject areas

    • Nuclear and High Energy Physics
    • Instrumentation

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