Interface characteristics of iso-structural thin film and substrate pairs

C. M. Wang, S. Thevuthasan, F. Gao, V. Shutthanandan, D. E. McCready, S. A. Chambers, C. H F Peden

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Cubic-CeO2 and α-Fe2O3 thin films have been epitaxially grown on yttria-stabilized ZrO2 and α-Al2O3 substrates, respectively, by oxygen plasma assisted molecular beam epitaxy. The interface structural features between the films and the substrates were characterized by Rutherford backscattering spectrometry (RBS), high resolution transmission electron microscopy (HRTEM), and X-ray diffraction (XRD). RBS channeling spectra for both CeO2/ZrO2 and Fe2O3/Al2O3 show interface disorder-related scattering peaks. It is believed that the observed interface disorder-related scattering peaks in the RBS spectra are due to interface misfit dislocations. Cross sectional HRTEM reveals that interfaces of both systems are similarly characterized by coherent regions that are separated by misfit dislocations periodically distributed along the interface. The experimentally observed dislocation spacings are approximately consistent with those calculated from the lattice mismatch, implying that the lattice mismatch is accommodated mainly by interface misfit dislocations.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume207
Issue number1
DOIs
Publication statusPublished - May 2003
Externally publishedYes

Fingerprint

Rutherford backscattering spectroscopy
Dislocations (crystals)
Spectrometry
Lattice mismatch
High resolution transmission electron microscopy
Thin films
Substrates
thin films
Scattering
Yttrium oxide
backscattering
Molecular beam epitaxy
Oxygen
Plasmas
X ray diffraction
disorders
spectroscopy
transmission electron microscopy
high resolution
oxygen plasma

Keywords

  • α-FeO
  • c-CeO
  • Interface dislocations
  • RBS
  • TEM
  • Thin film

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Instrumentation
  • Surfaces and Interfaces

Cite this

Interface characteristics of iso-structural thin film and substrate pairs. / Wang, C. M.; Thevuthasan, S.; Gao, F.; Shutthanandan, V.; McCready, D. E.; Chambers, S. A.; Peden, C. H F.

In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 207, No. 1, 05.2003, p. 1-9.

Research output: Contribution to journalArticle

Wang, C. M. ; Thevuthasan, S. ; Gao, F. ; Shutthanandan, V. ; McCready, D. E. ; Chambers, S. A. ; Peden, C. H F. / Interface characteristics of iso-structural thin film and substrate pairs. In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 2003 ; Vol. 207, No. 1. pp. 1-9.
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