Integrated CMOS-MEMS flow sensor with high sensitivity and large flow range

Moaaz Ahmed, Wei Xu, Saqib Mohamad, Mingzheng Duan, Yi Kuen Lee, Amine Bermak

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

We present an integrated complimentary metal-oxide-semiconductor (CMOS) MEMS flow sensor, which demonstrates a very compact system on chip (SoC) that can sense N2 gas flow ranging from 0 to 26 m/s (0–50 sccm). Implemented in the proprietary InvenSense AlN process, our SoC features a very low-power current feedback instrumentation amplifier (CFIA) as a front-end readout circuit for a micro-calorimetric flow sensor configured in a Wheatstone bridge. To maintain a constant temperature difference of 56 K, an on-chip heater with off-chip op-amp feedback circuit is also implemented. The on-chip CFIA is chopped at 50 kHz to reduce its offset and flicker-noise and consumes 250 µA current. The measured sensitivity of our CMOS MEMS flow sensor is 35 mV/sccm.

Original languageEnglish
Pages (from-to)2318-2319
Number of pages2
JournalIEEE Sensors Journal
Volume17
Issue number8
DOIs
Publication statusPublished - 1 Jan 2017

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Keywords

  • Chopper amplifier
  • MEMS flow sensor
  • System-on-chip
  • Wafer scale integration

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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