Integrated CMOS-MEMS flow sensor with high sensitivity and large flow range

Moaaz Ahmed, Wei Xu, Saqib Mohamad, Mingzheng Duan, Yi Kuen Lee, Amine Bermak

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We present an integrated complimentary metal-oxide-semiconductor (CMOS) MEMS flow sensor, which demonstrates a very compact system on chip (SoC) that can sense N2 gas flow ranging from 0 to 26 m/s (0–50 sccm). Implemented in the proprietary InvenSense AlN process, our SoC features a very low-power current feedback instrumentation amplifier (CFIA) as a front-end readout circuit for a micro-calorimetric flow sensor configured in a Wheatstone bridge. To maintain a constant temperature difference of 56 K, an on-chip heater with off-chip op-amp feedback circuit is also implemented. The on-chip CFIA is chopped at 50 kHz to reduce its offset and flicker-noise and consumes 250 µA current. The measured sensitivity of our CMOS MEMS flow sensor is 35 mV/sccm.

Original languageEnglish
Pages (from-to)2318-2319
Number of pages2
JournalIEEE Sensors Journal
Volume17
Issue number8
DOIs
Publication statusPublished - 1 Jan 2017

Fingerprint

metal oxide semiconductors
microelectromechanical systems
MEMS
chips
Feedback
sensitivity
sensors
Sensors
Metals
Networks (circuits)
Operational amplifiers
amplifiers
Flow of gases
feedback circuits
Wheatstone bridges
flicker
heaters
gas flow
readout
temperature gradients

Keywords

  • Chopper amplifier
  • MEMS flow sensor
  • System-on-chip
  • Wafer scale integration

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Integrated CMOS-MEMS flow sensor with high sensitivity and large flow range. / Ahmed, Moaaz; Xu, Wei; Mohamad, Saqib; Duan, Mingzheng; Lee, Yi Kuen; Bermak, Amine.

In: IEEE Sensors Journal, Vol. 17, No. 8, 01.01.2017, p. 2318-2319.

Research output: Contribution to journalArticle

Ahmed, Moaaz ; Xu, Wei ; Mohamad, Saqib ; Duan, Mingzheng ; Lee, Yi Kuen ; Bermak, Amine. / Integrated CMOS-MEMS flow sensor with high sensitivity and large flow range. In: IEEE Sensors Journal. 2017 ; Vol. 17, No. 8. pp. 2318-2319.
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