Improved prediction of electrodes' mass loading effect on MEMS FBAR structure in longitudinal resonance

Annie Ruimi, Yueming Liang, Robert M. McMeeking

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we derive an exact one-dimensional rule for predicting mass loading effect due to electrodes by analyzing a FBAR structure consisting of a piezoelectric layer and two electrodes in longitudinal resonance. We validate the numerical scheme using aluminum nitride as the piezoelectric material and gold and aluminum for the top and bottom electrodes respectively. Results are compared with three-dimensional finite elements simulations obtained earlier. It is seen that the new rule predicts higher values of the resonant frequency and constitutes an improvement over an elementary rule particularly for electrodes thicknesses greater than 20% of the piezoelectric layer thickness.

Original languageEnglish
Title of host publicationProceedings of the ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008
Pages397-402
Number of pages6
Volume1
DOIs
Publication statusPublished - 2008
EventASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008 - Ellicott City, MD, United States
Duration: 28 Oct 200830 Oct 2008

Other

OtherASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008
CountryUnited States
CityEllicott City, MD
Period28/10/0830/10/08

Fingerprint

MEMS
Electrodes
Aluminum nitride
Piezoelectric materials
Natural frequencies
Gold
Aluminum

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Control and Systems Engineering
  • Mechanics of Materials
  • Building and Construction

Cite this

Ruimi, A., Liang, Y., & McMeeking, R. M. (2008). Improved prediction of electrodes' mass loading effect on MEMS FBAR structure in longitudinal resonance. In Proceedings of the ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008 (Vol. 1, pp. 397-402) https://doi.org/10.1115/SMASIS2008-482

Improved prediction of electrodes' mass loading effect on MEMS FBAR structure in longitudinal resonance. / Ruimi, Annie; Liang, Yueming; McMeeking, Robert M.

Proceedings of the ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008. Vol. 1 2008. p. 397-402.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ruimi, A, Liang, Y & McMeeking, RM 2008, Improved prediction of electrodes' mass loading effect on MEMS FBAR structure in longitudinal resonance. in Proceedings of the ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008. vol. 1, pp. 397-402, ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008, Ellicott City, MD, United States, 28/10/08. https://doi.org/10.1115/SMASIS2008-482
Ruimi A, Liang Y, McMeeking RM. Improved prediction of electrodes' mass loading effect on MEMS FBAR structure in longitudinal resonance. In Proceedings of the ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008. Vol. 1. 2008. p. 397-402 https://doi.org/10.1115/SMASIS2008-482
Ruimi, Annie ; Liang, Yueming ; McMeeking, Robert M. / Improved prediction of electrodes' mass loading effect on MEMS FBAR structure in longitudinal resonance. Proceedings of the ASME Conference on Smart Materials, Adaptive Structures and Intelligent Systems, SMASIS2008. Vol. 1 2008. pp. 397-402
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