High resolution XPS study of oxide layers grown on Ge substrates

Nouar Tabet, M. Faiz, N. M. Hamdan, Z. Hussain

Research output: Contribution to journalArticle

59 Citations (Scopus)

Abstract

High resolution X-ray photoelectron spectroscopy (XPS) was used to analyze thin layers of germanium oxide grown on germanium substrates under various conditions. The results reveal the presence of high density of electron states located at the oxide/germanium interface that lead to the energy band bending. The surface of native oxide layers and that of thin oxide layer grown under dry oxygen correspond to GeO2 composition. Under Ar etching, lower oxidation states were revealed. Short in situ heat treatment at T = 673 K under ultrahigh vacuum leads to the removal of the oxide layer. In addition, the analysis of the layer grown at T = 653 K under dry oxygen suggests that carbides form at the oxide/substrate interface.

Original languageEnglish
Pages (from-to)68-72
Number of pages5
JournalSurface Science
Volume523
Issue number1-2
DOIs
Publication statusPublished - 10 Jan 2003
Externally publishedYes

Fingerprint

Oxides
X ray photoelectron spectroscopy
Germanium oxides
photoelectron spectroscopy
oxides
germanium oxides
high resolution
Substrates
x rays
Oxygen
Germanium
Electronic density of states
Ultrahigh vacuum
Band structure
Carbides
oxygen
Etching
electron states
carbides
Heat treatment

Keywords

  • Germanium
  • Oxidation
  • Surface electronic phenomena (work function, surface potential, surface states, etc.)
  • X-ray photoelectron spectroscopy

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

High resolution XPS study of oxide layers grown on Ge substrates. / Tabet, Nouar; Faiz, M.; Hamdan, N. M.; Hussain, Z.

In: Surface Science, Vol. 523, No. 1-2, 10.01.2003, p. 68-72.

Research output: Contribution to journalArticle

Tabet, Nouar ; Faiz, M. ; Hamdan, N. M. ; Hussain, Z. / High resolution XPS study of oxide layers grown on Ge substrates. In: Surface Science. 2003 ; Vol. 523, No. 1-2. pp. 68-72.
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