High performance high density gas-FET array in standard CMOS

Qian Yu, Xiaopeng Zhong, Farid Boussaid, Amine Bermak, Cy Tsui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

New gas sensitive FET (Gas-FET) structures are proposed to enable standard CMOS fabrication of high performance high density gas sensor arrays that are fully integrated with their associated circuitry. The performance of the proposed Gas-FET structures was investigated by fabricating an 8×8 Gas-FET array comprising 45μm×46μm sensing elements. Room temperature sub-ppm acetone sensing capability is demonstrated for non-invasive diabetes diagnosis through exhaled human breath. Performance comparison shows that the fabricated array boasts superior sensitivity while enabling ultra-low power operation at room temperature, with over 3 orders magnitude reduction in power consumption compared to previously reported standard CMOS resistive gas sensors.

Original languageEnglish
Title of host publication2018 IEEE Symposium on VLSI Technology, VLSI Technology 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages39-40
Number of pages2
Volume2018-June
ISBN (Electronic)9781538642160
DOIs
Publication statusPublished - 25 Oct 2018
Event38th IEEE Symposium on VLSI Technology, VLSI Technology 2018 - Honolulu, United States
Duration: 18 Jun 201822 Jun 2018

Other

Other38th IEEE Symposium on VLSI Technology, VLSI Technology 2018
CountryUnited States
CityHonolulu
Period18/6/1822/6/18

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Yu, Q., Zhong, X., Boussaid, F., Bermak, A., & Tsui, C. (2018). High performance high density gas-FET array in standard CMOS. In 2018 IEEE Symposium on VLSI Technology, VLSI Technology 2018 (Vol. 2018-June, pp. 39-40). [8510700] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VLSIT.2018.8510700