Fully Integrated Bidirectional CMOS-MEMS Flow Sensor with Low Power Pulse Operation

Moaaz Ahmed, Wei Xu, Saqib Mohamad, Farid Boussaid, Yi Kuen Lee, Amine Bermak

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N 2 gas flow. Our SoC features a very low-noise instrumentation amplifier that is implemented on a CMOS wafer and serves as a readout integrated circuit for a thermoresistive micro-calorimetric flow sensor which is fabricated on a MEMS wafer. A compact heterogeneous integration is achieved by combining the two wafers via the proprietary InvenSense AlN process. The measured sensitivity of our CMOS MEMS flow sensor is 98 mV/sccm which is three times better than the state-of-the-art counterpart. The flow range measured by our SoC is from-26 to 26 m/s (from-50 to 50 sccm). Moreover, the pulsed heater operation makes this proposed SoC flow sensor a very low power (<9 mW) and, thus, a promising candidate for the Internet-of-Things applications in smart home/green buildings.

Original languageEnglish
Article number8607070
Pages (from-to)3415-3424
Number of pages10
JournalIEEE Sensors Journal
Volume19
Issue number9
DOIs
Publication statusPublished - 1 May 2019

Fingerprint

microelectromechanical systems
MEMS
CMOS
chips
sensors
Sensors
pulses
wafers
Flow of gases
Integrated circuits
heaters
low noise
integrated circuits
gas flow
readout
amplifiers
System-on-chip
sensitivity

Keywords

  • CMOS MEMS flow sensor
  • instrumentation amplifiers
  • readout integrated circuit
  • Wheatstone bridge

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Fully Integrated Bidirectional CMOS-MEMS Flow Sensor with Low Power Pulse Operation. / Ahmed, Moaaz; Xu, Wei; Mohamad, Saqib; Boussaid, Farid; Lee, Yi Kuen; Bermak, Amine.

In: IEEE Sensors Journal, Vol. 19, No. 9, 8607070, 01.05.2019, p. 3415-3424.

Research output: Contribution to journalArticle

Ahmed, Moaaz ; Xu, Wei ; Mohamad, Saqib ; Boussaid, Farid ; Lee, Yi Kuen ; Bermak, Amine. / Fully Integrated Bidirectional CMOS-MEMS Flow Sensor with Low Power Pulse Operation. In: IEEE Sensors Journal. 2019 ; Vol. 19, No. 9. pp. 3415-3424.
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