Fully Integrated Bidirectional CMOS-MEMS Flow Sensor with Low Power Pulse Operation

Moaaz Ahmed, Wei Xu, Saqib Mohamad, Farid Boussaid, Yi Kuen Lee, Amine Bermak

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Leveraging More-than-Moore technology, we demonstrate an integrated CMOS MEMS flow sensor via a very compact system on chip (SoC) that can sense the bidirectional N 2 gas flow. Our SoC features a very low-noise instrumentation amplifier that is implemented on a CMOS wafer and serves as a readout integrated circuit for a thermoresistive micro-calorimetric flow sensor which is fabricated on a MEMS wafer. A compact heterogeneous integration is achieved by combining the two wafers via the proprietary InvenSense AlN process. The measured sensitivity of our CMOS MEMS flow sensor is 98 mV/sccm which is three times better than the state-of-the-art counterpart. The flow range measured by our SoC is from-26 to 26 m/s (from-50 to 50 sccm). Moreover, the pulsed heater operation makes this proposed SoC flow sensor a very low power (<9 mW) and, thus, a promising candidate for the Internet-of-Things applications in smart home/green buildings.

Original languageEnglish
Article number8607070
Pages (from-to)3415-3424
Number of pages10
JournalIEEE Sensors Journal
Volume19
Issue number9
DOIs
Publication statusPublished - 1 May 2019

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Keywords

  • CMOS MEMS flow sensor
  • instrumentation amplifiers
  • readout integrated circuit
  • Wheatstone bridge

ASJC Scopus subject areas

  • Instrumentation
  • Electrical and Electronic Engineering

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