The development of flexible microbolometers for use in smart fabrics with embedded sensors is discussed. The developments made on 'smart skin', a flexible substrate that incorporates electronic sensors for measuring temperature, flow acceleration, pressure, and the associated electronic circuitry at the Microsensors Lab are also discussed. The fabrication of microbolometers on flexible substrates is done by spin casting the substrate on a silicon wafer carrier with liquid polyimide. The process allows conventional silicon microfabrication equipment to be used to fabricate the sensors on flexible substrates.
|Number of pages||5|
|Journal||Laser Focus World|
|Publication status||Published - Apr 2004|
ASJC Scopus subject areas
- Electrical and Electronic Engineering