Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

Miao Lu, Amine Bermak, Yi Kuen Lee

Research output: Chapter in Book/Report/Conference proceedingConference contribution

15 Citations (Scopus)

Abstract

This paper reports the characterization of piezoresistivity of Conductive Polydimethylsiloxane (CPDMS) and the corresponding fabricating process for a parylene-coated, CPDMS Micro Fingerprint Sensor (MFS) with mushroom-shaped electrodes. Gauge factor of about 7.4 was demonstrated, and the piezoresistive sensitivity was about 3×10-6 Pa-1 in the tensile test setup. The packaged MFS sensors were characterized by a pneumatic test and a nanoindentation test. We demonstrate that the fabricated device can detect pressure and force levels bellow 10 kPa and 50 μN, respectively. The use of the material and process presented in this paper offers the opportunity to realize a robust micro fingerprint sensor with low cost, low temperature process on different substrates.

Original languageEnglish
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages251-254
Number of pages4
Publication statusPublished - 1 Dec 2007
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: 21 Jan 200725 Jan 2007

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
CountryJapan
CityKobe
Period21/1/0725/1/07

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lu, M., Bermak, A., & Lee, Y. K. (2007). Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 251-254). [4433102] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).