Fabrication of NdFeB thin film and its application in MEMS

Pan Zheng, Mohammad Kilani, Yousef S. Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages401-404
Number of pages4
ISBN (Print)0791836428, 9780791836422
DOIs
Publication statusPublished - 1 Jan 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

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ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Zheng, P., Kilani, M., Haik, Y. S., & Chen, C. J. (2002). Fabrication of NdFeB thin film and its application in MEMS. In Microelectromechanical Systems (pp. 401-404). (ASME International Mechanical Engineering Congress and Exposition, Proceedings). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33401