Fabrication of NdFeB thin film and its application in MEMS

Pan Zheng, Mohammad Kilani, Yousef Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages401-404
Number of pages4
ISBN (Print)0791836428, 9780791836422
DOIs
Publication statusPublished - 2002
Externally publishedYes

Fingerprint

Saturation magnetization
Inductance
MEMS
Gears
Magnetic properties
Pumps
Magnetic fields
Fabrication
Thin films

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Zheng, P., Kilani, M., Haik, Y., & Chen, C. J. (2002). Fabrication of NdFeB thin film and its application in MEMS. In Microelectromechanical Systems (pp. 401-404). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33401

Fabrication of NdFeB thin film and its application in MEMS. / Zheng, Pan; Kilani, Mohammad; Haik, Yousef; Chen, Ching Jen.

Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2002. p. 401-404.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zheng, P, Kilani, M, Haik, Y & Chen, CJ 2002, Fabrication of NdFeB thin film and its application in MEMS. in Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), pp. 401-404. https://doi.org/10.1115/IMECE2002-33401
Zheng P, Kilani M, Haik Y, Chen CJ. Fabrication of NdFeB thin film and its application in MEMS. In Microelectromechanical Systems. American Society of Mechanical Engineers (ASME). 2002. p. 401-404 https://doi.org/10.1115/IMECE2002-33401
Zheng, Pan ; Kilani, Mohammad ; Haik, Yousef ; Chen, Ching Jen. / Fabrication of NdFeB thin film and its application in MEMS. Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2002. pp. 401-404
@inproceedings{ea4b8c5bae9646398af8f1bef0d9fb7b,
title = "Fabrication of NdFeB thin film and its application in MEMS",
abstract = "The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.",
author = "Pan Zheng and Mohammad Kilani and Yousef Haik and Chen, {Ching Jen}",
year = "2002",
doi = "10.1115/IMECE2002-33401",
language = "English",
isbn = "0791836428",
pages = "401--404",
booktitle = "Microelectromechanical Systems",
publisher = "American Society of Mechanical Engineers (ASME)",

}

TY - GEN

T1 - Fabrication of NdFeB thin film and its application in MEMS

AU - Zheng, Pan

AU - Kilani, Mohammad

AU - Haik, Yousef

AU - Chen, Ching Jen

PY - 2002

Y1 - 2002

N2 - The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

AB - The paper measures the magnetic properties of NdFeB thin films developed under the effects of magnetic field. The samples exhibited a larger residual inductance, saturation magnetization and energy product than those treated without field or with weaker field. Magnetic MEMS was introduced with application of the NdFeB film to micro device such as pumps and gear transmission system.

UR - http://www.scopus.com/inward/record.url?scp=78249248998&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78249248998&partnerID=8YFLogxK

U2 - 10.1115/IMECE2002-33401

DO - 10.1115/IMECE2002-33401

M3 - Conference contribution

SN - 0791836428

SN - 9780791836422

SP - 401

EP - 404

BT - Microelectromechanical Systems

PB - American Society of Mechanical Engineers (ASME)

ER -