Fabrication of array microstructures using serial and parallel localized electrodeposition

Ra'A Said, Nidal Alshwawreh, Yousef Haik

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

To add to the development efforts in enhancing the capabilities of localized electrodeposition (LED) fabrication technique, this paper presents serial and parallel deposition algorithms to fabricate array microstructures. Such arrays can be implemented as microsensors in neural recording applications or as antenna arrays in ultra high frequency applications. Also, magnetic tip microarrays for tissue engineering can be realized. In the case of serial fabrication, an array of high aspect ratio microstructures is realized using the conventional single-tip microelectrode while implementing a multistep fabrication algorithm. In this algorithm, the fabricated microstructure elements within the array are realized one at a time. In the parallel deposition algorithm, the array is realized using a multitip array microelectrode while implementing a single step fabrication algorithm. In this algorithm, the microstructure elements within the array are fabricated simultaneously. The proposed algorithms are compared through a demonstration of fabricated array microstructures.

Original languageEnglish
Pages (from-to)323-332
Number of pages10
JournalInternational Journal of Nanoscience
Volume8
Issue number3
DOIs
Publication statusPublished - 1 Jun 2009

Keywords

  • Array electrodes
  • Micro-/nanofabrication
  • Serial/parallel localized electrodeposition

ASJC Scopus subject areas

  • Biotechnology
  • Bioengineering
  • Materials Science(all)
  • Condensed Matter Physics
  • Computer Science Applications
  • Electrical and Electronic Engineering

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