Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor

Xiaofang Pan, Xiaojin Zhao, Amine Bermak, Zhiyong Fan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a novel CMOS-compatible ZnO nanocomb-based gas sensor is presented. Compared with previously reported implementations, the proposed ZnO nanocombs feature multiple conducting channels and much larger effective sensing area, both of which result in dramatically improved sensitivity (6.54 for 250 ppm CO), response time (3.4 min) and recovery time (0.24 min). In addition, by operating the gas sensor at room temperature, additional power-hungry heating components inevitable in traditional implementations are completely removed. This not only leads to low power consumption, but also avoids the high-temperature-caused reliability degradation when integrated with CMOS circuitry.

Original languageEnglish
Title of host publicationISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems
Pages3270-3273
Number of pages4
DOIs
Publication statusPublished - 2012
Externally publishedYes
Event2012 IEEE International Symposium on Circuits and Systems, ISCAS 2012 - Seoul, Korea, Republic of
Duration: 20 May 201223 May 2012

Other

Other2012 IEEE International Symposium on Circuits and Systems, ISCAS 2012
CountryKorea, Republic of
CitySeoul
Period20/5/1223/5/12

Fingerprint

Chemical sensors
Fabrication
Electric power utilization
Heating
Recovery
Degradation
Temperature

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Pan, X., Zhao, X., Bermak, A., & Fan, Z. (2012). Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor. In ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems (pp. 3270-3273). [6272023] https://doi.org/10.1109/ISCAS.2012.6272023

Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor. / Pan, Xiaofang; Zhao, Xiaojin; Bermak, Amine; Fan, Zhiyong.

ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems. 2012. p. 3270-3273 6272023.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Pan, X, Zhao, X, Bermak, A & Fan, Z 2012, Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor. in ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems., 6272023, pp. 3270-3273, 2012 IEEE International Symposium on Circuits and Systems, ISCAS 2012, Seoul, Korea, Republic of, 20/5/12. https://doi.org/10.1109/ISCAS.2012.6272023
Pan X, Zhao X, Bermak A, Fan Z. Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor. In ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems. 2012. p. 3270-3273. 6272023 https://doi.org/10.1109/ISCAS.2012.6272023
Pan, Xiaofang ; Zhao, Xiaojin ; Bermak, Amine ; Fan, Zhiyong. / Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor. ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems. 2012. pp. 3270-3273
@inproceedings{76fd2a93a03c4615812c263517ea1dd5,
title = "Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor",
abstract = "In this paper, a novel CMOS-compatible ZnO nanocomb-based gas sensor is presented. Compared with previously reported implementations, the proposed ZnO nanocombs feature multiple conducting channels and much larger effective sensing area, both of which result in dramatically improved sensitivity (6.54 for 250 ppm CO), response time (3.4 min) and recovery time (0.24 min). In addition, by operating the gas sensor at room temperature, additional power-hungry heating components inevitable in traditional implementations are completely removed. This not only leads to low power consumption, but also avoids the high-temperature-caused reliability degradation when integrated with CMOS circuitry.",
author = "Xiaofang Pan and Xiaojin Zhao and Amine Bermak and Zhiyong Fan",
year = "2012",
doi = "10.1109/ISCAS.2012.6272023",
language = "English",
pages = "3270--3273",
booktitle = "ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems",

}

TY - GEN

T1 - Fabrication of a low power CMOS-compatible ZnO nanocomb-based gas sensor

AU - Pan, Xiaofang

AU - Zhao, Xiaojin

AU - Bermak, Amine

AU - Fan, Zhiyong

PY - 2012

Y1 - 2012

N2 - In this paper, a novel CMOS-compatible ZnO nanocomb-based gas sensor is presented. Compared with previously reported implementations, the proposed ZnO nanocombs feature multiple conducting channels and much larger effective sensing area, both of which result in dramatically improved sensitivity (6.54 for 250 ppm CO), response time (3.4 min) and recovery time (0.24 min). In addition, by operating the gas sensor at room temperature, additional power-hungry heating components inevitable in traditional implementations are completely removed. This not only leads to low power consumption, but also avoids the high-temperature-caused reliability degradation when integrated with CMOS circuitry.

AB - In this paper, a novel CMOS-compatible ZnO nanocomb-based gas sensor is presented. Compared with previously reported implementations, the proposed ZnO nanocombs feature multiple conducting channels and much larger effective sensing area, both of which result in dramatically improved sensitivity (6.54 for 250 ppm CO), response time (3.4 min) and recovery time (0.24 min). In addition, by operating the gas sensor at room temperature, additional power-hungry heating components inevitable in traditional implementations are completely removed. This not only leads to low power consumption, but also avoids the high-temperature-caused reliability degradation when integrated with CMOS circuitry.

UR - http://www.scopus.com/inward/record.url?scp=84866617760&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84866617760&partnerID=8YFLogxK

U2 - 10.1109/ISCAS.2012.6272023

DO - 10.1109/ISCAS.2012.6272023

M3 - Conference contribution

AN - SCOPUS:84866617760

SP - 3270

EP - 3273

BT - ISCAS 2012 - 2012 IEEE International Symposium on Circuits and Systems

ER -