Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses

Margaux Chanal, Vladimir Yu Fedorov, Maxime Chambonneau, Raphae¨l Clady, Olivier Ute´za, Stylianos Tzortzakis, David Grojo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2017
PublisherOSA - The Optical Society
VolumePart F82-CLEO_Europe 2017
ISBN (Electronic)9781557528209
Publication statusPublished - 1 Jan 2017
EventThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2017 - Munich, Germany
Duration: 25 Jun 201729 Jun 2017

Other

OtherThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2017
CountryGermany
CityMunich
Period25/6/1729/6/17

Fingerprint

Silicon
Ultrashort pulses
Infrared radiation

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Chanal, M., Yu Fedorov, V., Chambonneau, M., Clady, R., Ute´za, O., Tzortzakis, S., & Grojo, D. (2017). Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses. In The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017 (Vol. Part F82-CLEO_Europe 2017). OSA - The Optical Society.

Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses. / Chanal, Margaux; Yu Fedorov, Vladimir; Chambonneau, Maxime; Clady, Raphae¨l; Ute´za, Olivier; Tzortzakis, Stylianos; Grojo, David.

The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017. Vol. Part F82-CLEO_Europe 2017 OSA - The Optical Society, 2017.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chanal, M, Yu Fedorov, V, Chambonneau, M, Clady, R, Ute´za, O, Tzortzakis, S & Grojo, D 2017, Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses. in The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017. vol. Part F82-CLEO_Europe 2017, OSA - The Optical Society, The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017, Munich, Germany, 25/6/17.
Chanal M, Yu Fedorov V, Chambonneau M, Clady R, Ute´za O, Tzortzakis S et al. Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses. In The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017. Vol. Part F82-CLEO_Europe 2017. OSA - The Optical Society. 2017
Chanal, Margaux ; Yu Fedorov, Vladimir ; Chambonneau, Maxime ; Clady, Raphae¨l ; Ute´za, Olivier ; Tzortzakis, Stylianos ; Grojo, David. / Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses. The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017. Vol. Part F82-CLEO_Europe 2017 OSA - The Optical Society, 2017.
@inproceedings{79c6b66a98ef4dd9bf3dd68a6d6066d5,
title = "Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses",
author = "Margaux Chanal and {Yu Fedorov}, Vladimir and Maxime Chambonneau and Raphae¨l Clady and Olivier Ute´za and Stylianos Tzortzakis and David Grojo",
year = "2017",
month = "1",
day = "1",
language = "English",
volume = "Part F82-CLEO_Europe 2017",
booktitle = "The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017",
publisher = "OSA - The Optical Society",

}

TY - GEN

T1 - Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses

AU - Chanal, Margaux

AU - Yu Fedorov, Vladimir

AU - Chambonneau, Maxime

AU - Clady, Raphae¨l

AU - Ute´za, Olivier

AU - Tzortzakis, Stylianos

AU - Grojo, David

PY - 2017/1/1

Y1 - 2017/1/1

UR - http://www.scopus.com/inward/record.url?scp=85039914117&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85039914117&partnerID=8YFLogxK

M3 - Conference contribution

VL - Part F82-CLEO_Europe 2017

BT - The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017

PB - OSA - The Optical Society

ER -