Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses

Margaux Chanal, Vladimir Yu Fedorov, Maxime Chambonneau, Raphae¨l Clady, Olivier Ute´za, Stylianos Tzortzakis, David Grojo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2017
PublisherOSA - The Optical Society
VolumePart F82-CLEO_Europe 2017
ISBN (Electronic)9781557528209
Publication statusPublished - 1 Jan 2017
EventThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2017 - Munich, Germany
Duration: 25 Jun 201729 Jun 2017

Other

OtherThe European Conference on Lasers and Electro-Optics, CLEO_Europe 2017
CountryGermany
CityMunich
Period25/6/1729/6/17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Chanal, M., Yu Fedorov, V., Chambonneau, M., Clady, R., Ute´za, O., Tzortzakis, S., & Grojo, D. (2017). Exceeding the bulk modification threshold of silicon with hyperfocused infrared femtosecond laser pulses. In The European Conference on Lasers and Electro-Optics, CLEO_Europe 2017 (Vol. Part F82-CLEO_Europe 2017). OSA - The Optical Society.