Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Mohammad I. Kilani, Paul C. Galambos, Yousef Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2001
EditorsA.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Pages515-518
Number of pages4
Volume3
Publication statusPublished - 2001
Externally publishedYes
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: 11 Nov 200116 Nov 2001

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
CountryUnited States
CityNew York, NY
Period11/11/0116/11/01

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ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kilani, M. I., Galambos, P. C., Haik, Y., & Chen, C. J. (2001). Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. In A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J-I. Mou, & M. Dunn (Eds.), Micro-Electro-Mechanical Systems (MEMS) - 2001 (Vol. 3, pp. 515-518)