Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design

Mohammad I. Kilani, Paul C. Galambos, Yousef Haik, Ching Jen Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

An offset planetary pump fabricated in five-level polysilicon surface micromachining is introduced. The pump consists of a ring gear enclosing two planetary gears and an offset sun gear, which generates pumping due to its eccentric rotation. The pump is driven by an electrostatically actuated comb-drive microengine and mechanical power is transmitted to the ring gear through a micro gear train. The paper presents a derivation of pump capacity and the detailed design of its mechanical elements, demonstrating the implementation of relatively advanced mechanical functions in multi-level surface micromachining, including axial roller bearing support, fluidic seal and planetary gear transmission.

Original languageEnglish
Title of host publicationMicro-Electro-Mechanical Systems (MEMS) - 2001
EditorsA.L. Lee, J. Simon, K. Breuer, S. Chen, R.S. Keynton, A. Malshe, J.-I. Mou, M. Dunn
Pages515-518
Number of pages4
Volume3
Publication statusPublished - 2001
Externally publishedYes
Event2001 ASME International Mechanical Engineering Congress and Exposition - New York, NY, United States
Duration: 11 Nov 200116 Nov 2001

Other

Other2001 ASME International Mechanical Engineering Congress and Exposition
CountryUnited States
CityNew York, NY
Period11/11/0116/11/01

Fingerprint

Gear pumps
Gears
Pumps
Surface micromachining
Roller bearings
Fluidics
Polysilicon
Sun
Seals

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Kilani, M. I., Galambos, P. C., Haik, Y., & Chen, C. J. (2001). Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. In A. L. Lee, J. Simon, K. Breuer, S. Chen, R. S. Keynton, A. Malshe, J-I. Mou, ... M. Dunn (Eds.), Micro-Electro-Mechanical Systems (MEMS) - 2001 (Vol. 3, pp. 515-518)

Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. / Kilani, Mohammad I.; Galambos, Paul C.; Haik, Yousef; Chen, Ching Jen.

Micro-Electro-Mechanical Systems (MEMS) - 2001. ed. / A.L. Lee; J. Simon; K. Breuer; S. Chen; R.S. Keynton; A. Malshe; J.-I. Mou; M. Dunn. Vol. 3 2001. p. 515-518.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kilani, MI, Galambos, PC, Haik, Y & Chen, CJ 2001, Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. in AL Lee, J Simon, K Breuer, S Chen, RS Keynton, A Malshe, J-I Mou & M Dunn (eds), Micro-Electro-Mechanical Systems (MEMS) - 2001. vol. 3, pp. 515-518, 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 11/11/01.
Kilani MI, Galambos PC, Haik Y, Chen CJ. Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. In Lee AL, Simon J, Breuer K, Chen S, Keynton RS, Malshe A, Mou J-I, Dunn M, editors, Micro-Electro-Mechanical Systems (MEMS) - 2001. Vol. 3. 2001. p. 515-518
Kilani, Mohammad I. ; Galambos, Paul C. ; Haik, Yousef ; Chen, Ching Jen. / Electrostatically Actuated Surface Micromachined Offset Planetary Gear Pump Design. Micro-Electro-Mechanical Systems (MEMS) - 2001. editor / A.L. Lee ; J. Simon ; K. Breuer ; S. Chen ; R.S. Keynton ; A. Malshe ; J.-I. Mou ; M. Dunn. Vol. 3 2001. pp. 515-518
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