Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings

G. Martinez, V. Shutthanandan, S. Thevuthasan, J. F. Chessa, C. V. Ramana

Research output: Contribution to journalArticle

22 Citations (Scopus)

Abstract

Titanium nitride (TiNx) coatings were grown by magnetron sputtering onto Si(100) substrates by varying time of deposition to produce coatings with variable thickness (dTiN) in the range of 20-120 nm. TiNx coatings were characterized by studying their structure, composition, and mechanical properties. Nuclear reaction analysis (NRA) combined with Rutherford backscattering spectrometry (RBS) analyses indicate that the grown coatings were stoichiometric TiN. Grazing incidence X-ray diffraction (GIXRD) measurements indicate that the texturing of TiN coatings changes as a function of dTiN. The (111) and (002) peaks appear initially; (111) becomes intense while (002) disappears with increasing dTiN. Dense, columnar grain structure was evident for all the coatings in electron microscopy analyses. The residual stress for TiN coatings with dTiN∼120 nm was 1.07 GPa in compression while thinner samples exhibit higher values of stress.

Original languageEnglish
Pages (from-to)5757-5764
Number of pages8
JournalCeramics International
Volume40
Issue number4
DOIs
Publication statusPublished - May 2014
Externally publishedYes

Fingerprint

Titanium nitride
Coatings
Chemical analysis
Nuclear reactions
Texturing
Crystal microstructure
Rutherford backscattering spectroscopy
titanium nitride
Magnetron sputtering
Spectrometry
Electron microscopy
Residual stresses
Compaction
X ray diffraction
Mechanical properties
Substrates

Keywords

  • Coatings
  • RBS
  • Residual stress
  • Structure
  • TiN

ASJC Scopus subject areas

  • Ceramics and Composites
  • Process Chemistry and Technology
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

Martinez, G., Shutthanandan, V., Thevuthasan, S., Chessa, J. F., & Ramana, C. V. (2014). Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings. Ceramics International, 40(4), 5757-5764. https://doi.org/10.1016/j.ceramint.2013.11.014

Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings. / Martinez, G.; Shutthanandan, V.; Thevuthasan, S.; Chessa, J. F.; Ramana, C. V.

In: Ceramics International, Vol. 40, No. 4, 05.2014, p. 5757-5764.

Research output: Contribution to journalArticle

Martinez, G, Shutthanandan, V, Thevuthasan, S, Chessa, JF & Ramana, CV 2014, 'Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings', Ceramics International, vol. 40, no. 4, pp. 5757-5764. https://doi.org/10.1016/j.ceramint.2013.11.014
Martinez, G. ; Shutthanandan, V. ; Thevuthasan, S. ; Chessa, J. F. ; Ramana, C. V. / Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings. In: Ceramics International. 2014 ; Vol. 40, No. 4. pp. 5757-5764.
@article{0b478e171a0d4a0b919286e31d9b7b38,
title = "Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings",
abstract = "Titanium nitride (TiNx) coatings were grown by magnetron sputtering onto Si(100) substrates by varying time of deposition to produce coatings with variable thickness (dTiN) in the range of 20-120 nm. TiNx coatings were characterized by studying their structure, composition, and mechanical properties. Nuclear reaction analysis (NRA) combined with Rutherford backscattering spectrometry (RBS) analyses indicate that the grown coatings were stoichiometric TiN. Grazing incidence X-ray diffraction (GIXRD) measurements indicate that the texturing of TiN coatings changes as a function of dTiN. The (111) and (002) peaks appear initially; (111) becomes intense while (002) disappears with increasing dTiN. Dense, columnar grain structure was evident for all the coatings in electron microscopy analyses. The residual stress for TiN coatings with dTiN∼120 nm was 1.07 GPa in compression while thinner samples exhibit higher values of stress.",
keywords = "Coatings, RBS, Residual stress, Structure, TiN",
author = "G. Martinez and V. Shutthanandan and S. Thevuthasan and Chessa, {J. F.} and Ramana, {C. V.}",
year = "2014",
month = "5",
doi = "10.1016/j.ceramint.2013.11.014",
language = "English",
volume = "40",
pages = "5757--5764",
journal = "Ceramics International",
issn = "0272-8842",
publisher = "Elsevier Limited",
number = "4",

}

TY - JOUR

T1 - Effect of thickness on the structure, composition and properties of titanium nitride nano-coatings

AU - Martinez, G.

AU - Shutthanandan, V.

AU - Thevuthasan, S.

AU - Chessa, J. F.

AU - Ramana, C. V.

PY - 2014/5

Y1 - 2014/5

N2 - Titanium nitride (TiNx) coatings were grown by magnetron sputtering onto Si(100) substrates by varying time of deposition to produce coatings with variable thickness (dTiN) in the range of 20-120 nm. TiNx coatings were characterized by studying their structure, composition, and mechanical properties. Nuclear reaction analysis (NRA) combined with Rutherford backscattering spectrometry (RBS) analyses indicate that the grown coatings were stoichiometric TiN. Grazing incidence X-ray diffraction (GIXRD) measurements indicate that the texturing of TiN coatings changes as a function of dTiN. The (111) and (002) peaks appear initially; (111) becomes intense while (002) disappears with increasing dTiN. Dense, columnar grain structure was evident for all the coatings in electron microscopy analyses. The residual stress for TiN coatings with dTiN∼120 nm was 1.07 GPa in compression while thinner samples exhibit higher values of stress.

AB - Titanium nitride (TiNx) coatings were grown by magnetron sputtering onto Si(100) substrates by varying time of deposition to produce coatings with variable thickness (dTiN) in the range of 20-120 nm. TiNx coatings were characterized by studying their structure, composition, and mechanical properties. Nuclear reaction analysis (NRA) combined with Rutherford backscattering spectrometry (RBS) analyses indicate that the grown coatings were stoichiometric TiN. Grazing incidence X-ray diffraction (GIXRD) measurements indicate that the texturing of TiN coatings changes as a function of dTiN. The (111) and (002) peaks appear initially; (111) becomes intense while (002) disappears with increasing dTiN. Dense, columnar grain structure was evident for all the coatings in electron microscopy analyses. The residual stress for TiN coatings with dTiN∼120 nm was 1.07 GPa in compression while thinner samples exhibit higher values of stress.

KW - Coatings

KW - RBS

KW - Residual stress

KW - Structure

KW - TiN

UR - http://www.scopus.com/inward/record.url?scp=84895060725&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84895060725&partnerID=8YFLogxK

U2 - 10.1016/j.ceramint.2013.11.014

DO - 10.1016/j.ceramint.2013.11.014

M3 - Article

AN - SCOPUS:84895060725

VL - 40

SP - 5757

EP - 5764

JO - Ceramics International

JF - Ceramics International

SN - 0272-8842

IS - 4

ER -