Effect of geometry on the performance of mems aluminum nitride trampoline resonators in longitudinal resonance

Annie Ruimi, Yueming Liang, Robert M. McMeeking

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The performance of a MEMS aluminum nitride trampoline-shape piezoelectric resonator is analyzed using three-dimensional finite element simulations. The device, targeted to operate at frequencies in the 3 GHz range is suitable for ultra-high-frequency (UHF) filtering applications. Material damping is accounted for in the model. The simulations are used to predict the effects of various geometric parameters on the resonator overall performance which is evaluated with the effective acoustic coupling coefficient (K2) and the quality factor (Q) and extracted from the electrical impedance frequency response plots. The results indicate that (i) K2 is insensitive to geometry (K 2∼6.5%), (ii) Q increases linearly with the A1N thickness and (iii) a trampoline resonator with three legs is slightly more efficient than those with more.

Original languageEnglish
Title of host publication2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
DOIs
Publication statusPublished - 2009
Event2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009 - Sharjah, United Arab Emirates
Duration: 23 Mar 200926 Mar 2009

Other

Other2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009
CountryUnited Arab Emirates
CitySharjah
Period23/3/0926/3/09

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ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Ruimi, A., Liang, Y., & McMeeking, R. M. (2009). Effect of geometry on the performance of mems aluminum nitride trampoline resonators in longitudinal resonance. In 2009 6th International Symposium on Mechatronics and its Applications, ISMA 2009 [5164801] https://doi.org/10.1109/ISMA.2009.5164801