Effect of chromium underlayer on the properties of nano-crystalline diamond films

E. Garratt, S. Alfaify, T. Yoshitake, Y. Katamune, M. Bowden, M. Nandasiri, M. Ghantasala, D. C. Mancini, S. Thevuthasan, A. Kayani

Research output: Contribution to journalArticle

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Abstract

This paper investigated the effect of chromium underlayer on the structure, microstructure, and composition of the nano-crystalline diamond films. Nano-crystalline diamond thin films were deposited at high temperature in microwave-induced plasma diluted with nitrogen, on single crystal silicon substrate with a thin film of chromium as an underlayer. Characterization of the film was implemented using non-Rutherford backscattering spectrometry, Raman spectroscopy, near-edge x-ray absorption fine structure, x-ray diffraction, and atomic force microscopy. Nanoindentation studies showed that the films deposited on chromium underlayer have higher hardness values compared to those deposited on silicon without an underlayer. Diamond and graphitic phases of the films evaluated by x-ray and optical spectroscopic analyses determined consistency between the sp2 and sp3 phases of carbon in chromium sample to that of diamond grown on silicon. Diffusion of chromium was observed using ion beam analysis which was correlated with the formation of chromium complexes by x-ray diffraction.

Original languageEnglish
Article number011913
JournalApplied Physics Letters
Volume102
Issue number1
DOIs
Publication statusPublished - 7 Jan 2013
Externally publishedYes

Fingerprint

diamond films
chromium
diamonds
silicon
x ray diffraction
thin films
nanoindentation
x ray absorption
backscattering
hardness
Raman spectroscopy
fine structure
ion beams
atomic force microscopy
microwaves
nitrogen
microstructure
carbon
single crystals
spectroscopy

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Garratt, E., Alfaify, S., Yoshitake, T., Katamune, Y., Bowden, M., Nandasiri, M., ... Kayani, A. (2013). Effect of chromium underlayer on the properties of nano-crystalline diamond films. Applied Physics Letters, 102(1), [011913]. https://doi.org/10.1063/1.4774086

Effect of chromium underlayer on the properties of nano-crystalline diamond films. / Garratt, E.; Alfaify, S.; Yoshitake, T.; Katamune, Y.; Bowden, M.; Nandasiri, M.; Ghantasala, M.; Mancini, D. C.; Thevuthasan, S.; Kayani, A.

In: Applied Physics Letters, Vol. 102, No. 1, 011913, 07.01.2013.

Research output: Contribution to journalArticle

Garratt, E, Alfaify, S, Yoshitake, T, Katamune, Y, Bowden, M, Nandasiri, M, Ghantasala, M, Mancini, DC, Thevuthasan, S & Kayani, A 2013, 'Effect of chromium underlayer on the properties of nano-crystalline diamond films', Applied Physics Letters, vol. 102, no. 1, 011913. https://doi.org/10.1063/1.4774086
Garratt E, Alfaify S, Yoshitake T, Katamune Y, Bowden M, Nandasiri M et al. Effect of chromium underlayer on the properties of nano-crystalline diamond films. Applied Physics Letters. 2013 Jan 7;102(1). 011913. https://doi.org/10.1063/1.4774086
Garratt, E. ; Alfaify, S. ; Yoshitake, T. ; Katamune, Y. ; Bowden, M. ; Nandasiri, M. ; Ghantasala, M. ; Mancini, D. C. ; Thevuthasan, S. ; Kayani, A. / Effect of chromium underlayer on the properties of nano-crystalline diamond films. In: Applied Physics Letters. 2013 ; Vol. 102, No. 1.
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