EBIC/XPS study of the antimony equilibrium segregation at germanium surface

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Abstract

The equilibrium segregation of antimony at Ge surface was investigated using X-ray Photoelectron Spectroscopy (XPS) and Electron Beam Induced Current (EBIC) techniques. XPS spectra showed a progressive shift of the germanium lines towards the high binding energies as the duration of the segregation treatment increases. The shift was related to the band bending in the surface region resulting from a high density of surface states. EBIC observations revealed islands of bright contrast covering few micron distance below the surface. The contrast was related to the increase of the depletion region width of the Schottky contact as a result of the dopant segregation.

Original languageEnglish
Pages (from-to)289-296
Number of pages8
JournalSolid State Phenomena
Volume78-79
Publication statusPublished - 1 Jan 2001
Event6th International Workshop on Beam Injection assesment of Microstructures in Semiconductors (BIAMS 2000) - Fukuoka, Japan
Duration: 12 Nov 200016 Nov 2000

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Keywords

  • EBIC
  • Germanium
  • Grain boundary
  • Surface segregation
  • XPS

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Materials Science(all)
  • Condensed Matter Physics

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